| Original Articles |
|
|
|
|
INFLUENCE OF LITHOGRAPHICAL PROCESSES ON THE SUPERCONDUCTIVITY OF YBaCuO THIN FILMS
|
| SUN Yuping;LIU Genqing;XU Xingcai;ZHU Xi;LUO Tangsheng |
| Microelectronics R and D Centre, Academia Sinica, Beijing, 100010 |
|
| Cite this article: |
|
SUN Yuping, LIU Genqing, XU Xingcai et al 1990 Chin. Phys. Lett. 7 32-35 |
|
|
|
Abstract This letter presents the results of the influnces of an ultra-violet lithography (UVL) and a h e r beam canning lithography (LBSL) on the superconductivity of YBaCuO thin films on SrTiO3 substrates. The degeneration of superconductivity of YBaCuO thin films in UVL process is more than that in LBSL process.
|
| Keywords:
73.60.Ka
|
|
|
Published: 01 January 1990
|
|
|
|
|
|
|
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
