| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
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Tetragonal Distortion of InN Thin Films by RBS/Channeling |
| DING Zhi-Bo1,2, WU Wei1, WANG Kun1, FA Tao1, YAO Shu-De1 |
| 1State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 1008712Nuclear and Radiation Safety Centre, State Environmental Protection Administration, Beijing 100088 |
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| Cite this article: |
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DING Zhi-Bo, WU Wei, WANG Kun et al 2009 Chin. Phys. Lett. 26 086111 |
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Abstract Rutherford backscattering and channeling spectrometry (RBS/C) are used to identify the crystalline quality (χmin=4.87%) of an InN thin film as a function of depth, and make a non-destructive quantitative analysis of the structure, in order to analyze the tetragonal distortion of the InN thin film at the depth determined.
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| Keywords:
61.72.Vv
82.80.Yc
61.85.+p
81.40.Jj
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Received: 19 May 2009
Published: 30 July 2009
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| PACS: |
61.72.Vv
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82.80.Yc
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(Rutherford backscattering (RBS), and other methods ofchemical analysis)
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61.85.+p
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(Channeling phenomena (blocking, energy loss, etc.) ?)
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81.40.Jj
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(Elasticity and anelasticity, stress-strain relations)
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