Chin. Phys. Lett.  2009, Vol. 26 Issue (8): 086111    DOI: 10.1088/0256-307X/26/8/086111
CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
Tetragonal Distortion of InN Thin Films by RBS/Channeling
DING Zhi-Bo1,2, WU Wei1, WANG Kun1, FA Tao1, YAO Shu-De1
1State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 1008712Nuclear and Radiation Safety Centre, State Environmental Protection Administration, Beijing 100088
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DING Zhi-Bo, WU Wei, WANG Kun et al  2009 Chin. Phys. Lett. 26 086111
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Abstract Rutherford backscattering and channeling spectrometry (RBS/C) are used to identify the crystalline quality (χmin=4.87%) of an InN thin film as a function of depth, and make a non-destructive quantitative analysis of the structure, in order to analyze the tetragonal distortion of the InN thin film at the depth determined.
Keywords: 61.72.Vv      82.80.Yc      61.85.+p      81.40.Jj     
Received: 19 May 2009      Published: 30 July 2009
PACS:  61.72.Vv  
  82.80.Yc (Rutherford backscattering (RBS), and other methods ofchemical analysis)  
  61.85.+p (Channeling phenomena (blocking, energy loss, etc.) ?)  
  81.40.Jj (Elasticity and anelasticity, stress-strain relations)  
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https://cpl.iphy.ac.cn/10.1088/0256-307X/26/8/086111       OR      https://cpl.iphy.ac.cn/Y2009/V26/I8/086111
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DING Zhi-Bo
WU Wei
WANG Kun
FA Tao
YAO Shu-De
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