Chin. Phys. Lett.  2004, Vol. 21 Issue (6): 1128-1130    DOI:
Original Articles |
Investigation of Microstructures of AlAs Oxides Before and After Oxidation
WANG Yong1;JIA Hai-Qiang1;MAI Zhen-Hong1;JIA Quan-Jie2;JIANG Xiao-Ming2
1Institute of Physics, Chinese Academy of Sciences, Beijing 100080 2Institute of High Energy Physics, Beijing Synchrotron Radiation Facility, Beijing 100039
Cite this article:   
WANG Yong, JIA Hai-Qiang, MAI Zhen-Hong et al  2004 Chin. Phys. Lett. 21 1128-1130
Download: PDF(441KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract The effect of lateral oxidation on microstructures of the GaAs/AlAs/GaAs heterostructure was studied by x-ray specular reflectivity, nonspecular scattering and diffraction. The GaAs/Al2O3/GaAs multilayer was obtained after oxidation of the GaAs/AlAs/GaAs sample. The results show that, before oxidation, there are two 40-Å-thick intermixing layers, one located between the AlAs sublayer and the GaAs substrate, and the other between the AlAs sublayer and the upper GaAs sublayer. After oxidation, these two intermixing sublayers disappear. The AlAs was oxidized into amorphous Al2O3 totally. The surface and interface roughnesses of the sample also decrease after oxidation.
Keywords: 73.40.Ty      61.10.Nz      61.10.Eq     
Published: 01 June 2004
PACS:  73.40.Ty (Semiconductor-insulator-semiconductor structures)  
  61.10.Nz  
  61.10.Eq  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2004/V21/I6/01128
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
WANG Yong
JIA Hai-Qiang
MAI Zhen-Hong
JIA Quan-Jie
JIANG Xiao-Ming
Related articles from Frontiers Journals
[1] WANG Xiao-Fei,**,HU Qiu-Bo,LI Li-Ben,CHEN Qing-Dong,WANG Hui-Xian,. Effect of Annealing Temperature on the Structural and Electrical Properties of a−Axis-Oriented SrTiO3 Films[J]. Chin. Phys. Lett., 2012, 29(5): 1128-1130
[2] GONG Yu-Fei,WU Ping,LIU Wei-Fang**,WANG Shou-Yu,LIU Guang-Yao,RAO Guang-Hui. Switchable Ferroelectric Diode Effect and Piezoelectric Properties of Bi0.9La0.1FeO3 Ceramics[J]. Chin. Phys. Lett., 2012, 29(4): 1128-1130
[3] DING Bin-Feng. Characterization of a ZnO Epilayer Grown on Sapphire by using Rutherford Backscattering/Channeling and X-Ray Diffraction[J]. Chin. Phys. Lett., 2012, 29(3): 1128-1130
[4] ZHAO Xiang-Fu**, HAN Ping, ZHANG Rong, ZHENG You-Dou . Influence of Fluorine on the Conductivity and Oxidation of Silicon Nanomembranes after Hydrofluoric Acid Treatment[J]. Chin. Phys. Lett., 2011, 28(8): 1128-1130
[5] ZHENG Ji-Ming, HUANG Yao-Qing**, REN Zhao-Yu, YANG Hui-Jing, CAO Mao-Sheng** . Electronic Non-Resonant Tunneling through Diaminoacenes: A First-Principles Investigation[J]. Chin. Phys. Lett., 2011, 28(2): 1128-1130
[6] LIU Xiao-Xu, YIN Jing-Hua, SUN Dao-Bin, BU Wen-Bin, CHENG Wei-Dong, WU Zhong-Hua. Small-Angle X-Ray Scattering Study on Nanostructures of Polyimide Films[J]. Chin. Phys. Lett., 2010, 27(9): 1128-1130
[7] XIAO Chun, ZHANG Ye-Wen, ZHENG Fei-Hu, WEI Wen-Jie, AN Zhen-Lian. Electric Field Analysis of Space Charge Injection from a Conductive Nano-Filler Electrode[J]. Chin. Phys. Lett., 2010, 27(7): 1128-1130
[8] NI Hai-Tao, ZHANG Xi-Yan, ZHU Yu-Tao. Quantitative Characterization of Partial Dislocations in Nanocrystalline Metals[J]. Chin. Phys. Lett., 2010, 27(5): 1128-1130
[9] HAO Xiao-Peng, ZHOU Chun-Lan, WANG Bao-Yi, WEI Long. Defects in Si-Rich SiO2 Films Prepared by Radio-Frequency Magnetron Co-sputtering Using Variable Energy Positron Annihilation Spectroscopy[J]. Chin. Phys. Lett., 2009, 26(4): 1128-1130
[10] HO Chi-Hon, LIAO Chien-Nan, CHIEN Feng-Tso, TSAI Yao-Tsung. Optimizing Design of Breakdown Voltage to Eliminate Back Gate Bias Effect in Silicon-on-Insulator Diode Using Low Doping Buried Layer[J]. Chin. Phys. Lett., 2009, 26(1): 1128-1130
[11] ZHENG Ji-Ming, REN Zhao-Yu, GUO Ping, TIAN Jin-Shou, BAI Jin-Tao. Effects of Contact Geometry on Electron Transport of 1,4-Diaminobenzene[J]. Chin. Phys. Lett., 2008, 25(4): 1128-1130
[12] CAO Bo, LI Gong-Ping, CHEN Xi-Meng, CHO Seong-Jin, KIM Hee. Atomic Diffusion in Cu/Si (111) and Cu/SiO2/Si (111) Systems by Neutral Cluster Beam Deposition[J]. Chin. Phys. Lett., 2008, 25(4): 1128-1130
[13] WANG Min, CEN Yu-Wan, ZHU Pei-Ping, HU Xiao-Fang, YU Xiao-Liu. Algorithm Study on Reconstruction of Refractive Angles in Fan Beam Diffraction Enhanced Computed Tomography[J]. Chin. Phys. Lett., 2008, 25(3): 1128-1130
[14] DING Zhi-Bo, WANG Kun, YAO Shu-De. A Comparison of GaN Epilayers with Multiple Buffer Layers and with a Single Buffer Layer Grown on Si(111) Studied by HRXRD and RBS/Channeling[J]. Chin. Phys. Lett., 2008, 25(3): 1128-1130
[15] GU Yi, ZHANG Yong-Gang. Properties of Strain Compensated Symmetrical Triangular Quantum Wells Composed of InGaAs/InAs Chirped Superlattice Grown Using Gas Source Molecular Beam Epitaxy[J]. Chin. Phys. Lett., 2008, 25(2): 1128-1130
Viewed
Full text


Abstract