中国物理快报  2005, Vol. 22 Issue (5): 1228-1231    
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Substrate Dependence of Properties of Sputtered ITO Films
GAO Mei-Zhen1,2, SHI Hui-Gang1, Job R.2, LI Fa-Shen1, Fahrner W. R.2
1Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, Lanzhou 730000 2Department of Electronic Devices, Faculty of Electrical Engineering, University of Hagen, Haldener Str. 182, D-58084 Hagen, Germany
Substrate Dependence of Properties of Sputtered ITO Films
GAO Mei-Zhen1,2;SHI Hui-Gang1;Job R.2;LI Fa-Shen1;Fahrner W. R.2
1Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, Lanzhou 730000 2Department of Electronic Devices, Faculty of Electrical Engineering, University of Hagen, Haldener Str. 182, D-58084 Hagen, Germany