Blue Light Emission from Hydrogenated Amorphous Silicon Carbide
Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System
MA Tian-fu, CHEN Kun-ji, DU Jia-fang, XU Jun, LI Wei, HUANG Xin-fan
National Laboratory of Solid State Microstructures and Department of Physics, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing University, Nanjing 210093
Blue Light Emission from Hydrogenated Amorphous Silicon Carbide
Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System
MA Tian-fu;CHEN Kun-ji;DU Jia-fang;XU Jun;LI Wei;HUANG Xin-fan
National Laboratory of Solid State Microstructures and Department of Physics, Center for Advanced Studies in Science and Technology of Microstructures, Nanjing University, Nanjing 210093
Abstract： We chose xylene C8H10 as carbon source instead of conventional methane CH4 to fabricate a-Sil-xCx: H films using plasma-enhanced chemial vapour deposition method. The optical band gap of this material could be widened to 3.1eV. And the infrared absorption spectra of our films manifest the existence of aromatic ring in them. Strong blue light emission with a peak wavelength of 490nm has been observed at room temperature.
MA Tian-fu;CHEN Kun-ji;DU Jia-fang;XU Jun;LI Wei;HUANG Xin-fan. Blue Light Emission from Hydrogenated Amorphous Silicon Carbide
Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System
[J]. 中国物理快报, 1996, 13(12): 947-949.
MA Tian-fu, CHEN Kun-ji, DU Jia-fang, XU Jun, LI Wei, HUANG Xin-fan. Blue Light Emission from Hydrogenated Amorphous Silicon Carbide
Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System
. Chin. Phys. Lett., 1996, 13(12): 947-949.
1996, Vol. 13 
