Fabrication of Thermo-Optic Switch in Silicon-on-Insulator
WANG Zhang-Tao, XIA Jin-Song, FAN Zhong-Chao, CHEN Shao-Wu, YU Jin-Zhong
State Key Laboratory on Integrated Optoelectronics, Institute
of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Fabrication of Thermo-Optic Switch in Silicon-on-Insulator
WANG Zhang-Tao;XIA Jin-Song;FAN Zhong-Chao;CHEN Shao-Wu;YU Jin-Zhong
State Key Laboratory on Integrated Optoelectronics, Institute
of Semiconductors, Chinese Academy of Sciences, Beijing 100083
关键词 ：
42.82.Ds ,
42.82.Cr
Abstract ：Silicon-on-insulator technology has been used to fabricate 2 x 2 thermo-optic switches. The switch shows crosstalk of -23.4 dB and extinction ratio of 18.1 dB in the bar-state. The switching speed is less than 30 μs and the power consumption is about 420 mW. The measured excess loss is 1.8 dB. These merits make the switch more attractive for applications in wavelength division multiplexing.
Key words ：
42.82.Ds
42.82.Cr
出版日期: 2003-12-01
:
42.82.Ds
(Interconnects, including holographic interconnects)
42.82.Cr
(Fabrication techniques; lithography, pattern transfer)
引用本文:
WANG Zhang-Tao;XIA Jin-Song;FAN Zhong-Chao;CHEN Shao-Wu;YU Jin-Zhong
. Fabrication of Thermo-Optic Switch in Silicon-on-Insulator
[J]. 中国物理快报, 2003, 20(12): 2185-2187.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2003/V20/I12/2185
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2003, Vol. 20 
