Novel Folding Large-Scale Optical Switch Matrix with Total Internal Reflection Mirrors on Silicon-on-Insulator by Anisotropy Chemical Etching
LIU Jing-Wei, YU Jin-Zhong, CHEN Shao-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083
Novel Folding Large-Scale Optical Switch Matrix with Total Internal Reflection Mirrors on Silicon-on-Insulator by Anisotropy Chemical Etching
LIU Jing-Wei;YU Jin-Zhong;CHEN Shao-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083
关键词 ：
42.82.Ds ,
42.82.Cr
Abstract ： A compact optical switch matrix was designed, in which light circuits were folded by total internal reflective (TIR) mirrors. Two key elements, 2×2 switch and TIR mirror, have been fabricated on silicon on-insulator wafer by anisotropy chemical etching. The 2×2 switch showed very low power consumption of 140mW and a very high speed of 8±1μs. An improved design for the TIR mirror was developed, and the fabricated mirror with smooth and vertical reflective facet showed low excess loss of 0.7±0.3dB at 1.55μm.
Key words ：
42.82.Ds
42.82.Cr
出版日期: 2005-01-01
:
42.82.Ds
(Interconnects, including holographic interconnects)
42.82.Cr
(Fabrication techniques; lithography, pattern transfer)
引用本文:
LIU Jing-Wei;YU Jin-Zhong;CHEN Shao-Wu. Novel Folding Large-Scale Optical Switch Matrix with Total Internal Reflection Mirrors on Silicon-on-Insulator by Anisotropy Chemical Etching[J]. 中国物理快报, 2005, 22(1): 142-145.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2005/V22/I1/142
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