A Silicon-on-Insulator-Based Thermo-Optic Waveguide Switch with Low Insertion Loss and Fast Response
LI Yan-Ping, YU Jin-Zhong, CHEN Shao-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083
A Silicon-on-Insulator-Based Thermo-Optic Waveguide Switch with Low Insertion Loss and Fast Response
LI Yan-Ping;YU Jin-Zhong;CHEN Shao-Wu
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083
关键词 ：
42.82.Ds ,
42.82.Et
Abstract ： A silicon-on-insulator-based thermo-optic waveguide switch integrated with spot size converters is designed and fabricated by inductively coupled plasma reactive ion etching. The device shows good characteristics, including low insertion loss of 8±1dB for wavelength 1530--1580nm and fast response times of 4.6μs for rising edge and 1.9μs for falling edge. The extinction ratios of the two channels are 19.1 and 18dB, respectively.
Key words ：
42.82.Ds
42.82.Et
出版日期: 2005-06-01
:
42.82.Ds
(Interconnects, including holographic interconnects)
42.82.Et
(Waveguides, couplers, and arrays)
引用本文:
LI Yan-Ping;YU Jin-Zhong;CHEN Shao-Wu. A Silicon-on-Insulator-Based Thermo-Optic Waveguide Switch with Low Insertion Loss and Fast Response[J]. 中国物理快报, 2005, 22(6): 1449-1451.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2005/V22/I6/1449
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2005, Vol. 22 
