Thermo-optical Switch Matrix Based on Silicon-on-Insulator Waveguides
LI Yan-Ping, YANG Di, SUN Fei, CHEN Shao-Wu, YU Jin-Zhong
State Key Laboratory of Integrated Opto-Electronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Thermo-optical Switch Matrix Based on Silicon-on-Insulator Waveguides
LI Yan-Ping;YANG Di;SUN Fei;CHEN Shao-Wu;YU Jin-Zhong
State Key Laboratory of Integrated Opto-Electronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
关键词 ：
42.82.Ds ,
42.82.Et
Abstract ： A thermo-optical waveguide switch matrix is designed and fabricated on silicon-on-insulator wafer. Multi-mode interferometers are used as power splitters and combiners in a Mach--Zehnder structure. Inductively coupled plasma reactive ion etching is used to fabricate the waveguides. The rise and fall times of the switch matrix are 13μs and 7μs, respectively. Switch cells have an average switching power consumption of 340mW.
Key words ：
42.82.Ds
42.82.Et
出版日期: 2005-03-01
:
42.82.Ds
(Interconnects, including holographic interconnects)
42.82.Et
(Waveguides, couplers, and arrays)
引用本文:
LI Yan-Ping;YANG Di;SUN Fei;CHEN Shao-Wu;YU Jin-Zhong. Thermo-optical Switch Matrix Based on Silicon-on-Insulator Waveguides[J]. 中国物理快报, 2005, 22(3): 621-623.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2005/V22/I3/621
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2005, Vol. 22 
