The Morphology of Patterning with Pseudoplastic Metal Nanoparticle Fluids during Heat Treatment

doi:10.1088/0256-307X/32/12/128102

Chin. Phys. Lett.

2015, Vol. 32

Issue (12): 128102 DOI: 10.1088/0256-307X/32/12/128102

CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY

The Morphology of Patterning with Pseudoplastic Metal Nanoparticle Fluids during Heat Treatment

WANG Wen¹, SU Yu-Feng², LIU Chao-Ran^1,3, LI Dong-Xue¹, WANG Pan¹, DUAN Zhi-Yong^1**

¹Physical Engineering School, Zhengzhou University, Zhengzhou 450001
²Mechanical Engineering School, Zhengzhou University, Zhengzhou 450001
³Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050

Cite this article:

WANG Wen, SU Yu-Feng, LIU Chao-Ran et al 2015 Chin. Phys. Lett. 32 128102

Download: PDF(646KB)
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks

Abstract A pseudoplastic metal nanoparticle fluid (PMNF) is used in nanoimprint to fabricate semiconductors and functional devices. The evaporation of the solvent and the sintering of the Au PMNF are investigated. The key parameters, which influence the morphology of patterning, such as the radius of metal particles, the concentration of metal particles, the Hamaker constant of the solvent, viscosity of the fluids and the evaporation velocity, are analyzed. Based on a two-sphere sintering model, the equations are derived, which represent the relationships between the relative shrinkage and radius of the metal particles, sintering temperature and time. The optimal parameters for the heat treatment are provided in nanoimprint.

Received: 28 May 2015 Published: 05 January 2016

PACS:	81.16.Nd	(Micro- and nanolithography)
	81.16.Rf	(Micro- and nanoscale pattern formation)
	85.85.+j	(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

TRENDMD:

URL:

https://cpl.iphy.ac.cn/10.1088/0256-307X/32/12/128102 OR https://cpl.iphy.ac.cn/Y2015/V32/I12/128102

Service
	E-mail this article
	E-mail Alert
	RSS
Articles by authors
	WANG Wen
	SU Yu-Feng
	LIU Chao-Ran
	LI Dong-Xue
	WANG Pan
	DUAN Zhi-Yong

[1] Kim K S et al 2011 Microelectron Eng. 88 855
[2] Wang Q H et al 2013 Opt. Lasers Eng. 51 944
[3] Seung H K et al 2007 Nano Lett. 7 1869
[4] Li T H et al 2013 Acta Phys. Sin. 62 068103 (in Chinese)
[5] Feng K and Li Z 2009 Chin. Phys. Lett. 26 126202
[6] Liang H M and Wang J Q 2011 Chin. Phys. Lett. 28 018101
[7] Li T H et al 2013 IEEE Trans. Nanotechnol. 12 589
[8] Li D X, Su Y F, Xia W W, Liu C R, Wang W, Wang P and Duan Z Y 2014 RSC Adv. 4 30402
[9] Xia W W et al 2013 Acta Phys. Sin. 62 188105 (in Chinese)
[10] Kim E U et al 2009 Nanotechnology 20 355302
[11] Dongjo K and Jooho M 2005 Electrochem. Solid-State Lett. 8 J30
[12] Lu K 2013 Nanoparticulat Materials (New York: John Wiley & Sons Inc.) chap 6 p 329
[13] Drews T O and Tsapatsis M 2007 Micropor. Mesopor. Mater. 101 97
[14] Israelachvili J N 2011 Intermolecular and Surface Forces (New York: Academic Press) p 311
[15] Allen M D and Raabe O G 1985 Aerosol. Sci. Tech. 4 269
[16] Xia W W et al 2013 RSC Adv. 3 17851
[17] Stickel J J and Powell R L 2005 Annu. Rev. Fluid Mech. 37 129
[18] Torquato S et al 2003 Int. J. Solids Struct. 40 7143
[19] Cheng B Q and Ngan A H W 2013 Comput. Mater. Sci. 74 1
[20] Perelaer J et al 2010 J. Mater. Chem. 20 8446
[21] Huang P Y 1997 Powder Metallurgy Principle (Beijing: Metallurgical Industry Press) p 282
[22] Jiang Q et al 2004 Solid State Commun. 130 581
[23] Zhang S and Gao H T 2009 J. Jilin Inst. Architecture & Civil Eng. 26 11
[24] Zhang Y N et al 2003 Acta Phys. Chim. Sin. 19 35

Related articles from Frontiers Journals

[1]	Zheng Chen, Min Wu, Yequn Liu, Wenshuai Gao, Yuyan Han, Jianhui Zhou, Wei Ning, and Mingliang Tian. Non-Monotonic Evolution of Carrier Density and Mobility under Thermal Cycling Treatments in Dirac Semimetal Cd$_{3}$As$_{2}$ Microbelts[J]. Chin. Phys. Lett., 2021, 38(4): 128102
[2]	Chufan Zhang, Ke Li, Xiaoxian Zang, Fuyuan Ma, and Yaping Dan. Towards Fabrication of Atomic Dopant Wires via Monolayer Doping Patterned by Resist-Free Lithography[J]. Chin. Phys. Lett., 2021, 38(2): 128102
[3]	Peng Ren, Gang Han, Bing-Lei Fu, Bin Xue, Ning Zhang, Zhe Liu, Li-Xia Zhao, Jun-Xi Wang, Jin-Min Li. Selective Area Growth and Characterization of GaN Nanorods Fabricated by Adjusting the Hydrogen Flow Rate and Growth Temperature with Metal Organic Chemical Vapor Deposition[J]. Chin. Phys. Lett., 2016, 33(06): 128102
[4]	ZHANG Zhi-Gang, DONG Feng-Liang, CHENG Teng, QIAN Ke-Mao, QIU Kang, ZHANG Qing-Chuan, CHU Wei-Guo, WU Xiao-Ping. Electron Beam Lithographic Pixelated Micropolarizer Array for Real-Time Phase Measurement[J]. Chin. Phys. Lett., 2014, 31(11): 128102
[5]	ZHAO Jian-Yi, CHEN Xin, ZHOU Ning, HUANG Xiao-Dong, CAO Ming-De, LIU Wen. A 16-Channel Distributed-Feedback Laser Array with a Monolithic Integrated Arrayed Waveguide Grating Multiplexer for a Wavelength Division Multiplex-Passive Optical Network System Network[J]. Chin. Phys. Lett., 2014, 31(07): 128102
[6]	ZHOU Pin-Jia, WANG Yi-Wen, WEI Lian-Fu. Anomalous Temperature Dependence of the Quality Factor in a Superconducting Coplanar Waveguide Resonator[J]. Chin. Phys. Lett., 2014, 31(06): 128102
[7]	CHEN Xin, ZHAO Jian-Yi, ZHOU Ning, HUANG Xiao-Dong, LIU Wen. Four-Channel 1.55-μm DFB Laser Array Monolithically Integrated with a 4×1 Multimode-Interference Combiner Based on Nanoimprint Lithography[J]. Chin. Phys. Lett., 2014, 31(04): 128102
[8]	ZHU Feng, MA Jian-Yong. Direct Laser Writing Facility for Fabrication of Submicron Mask[J]. Chin. Phys. Lett., 2014, 31(04): 128102
[9]	ZUO Qiang, ZHAO Jian-Yi, CHEN Xin, WANG Zhi-Hao, SUN Tang-You, ZHOU Ning, ZHAO Yan-Li, XU Zhi-Mou, LIU Wen . A Multiple Phase-Shifted Distributed Feedback (DFB) Laser Fabricated by Nanoimprint Lithography[J]. Chin. Phys. Lett., 2013, 30(5): 128102
[10]	TANG Min-Jin, XIE Hui-Min, LI Yan-Jie, LI Xiao-Jun, WU Dan. A New Grating Fabrication Technique on Metal Films Using UV-Nanoimprint Lithography[J]. Chin. Phys. Lett., 2012, 29(9): 128102
[11]	LI Hao, WANG Rui, GENG Yong-You, WU Yi-Qun, WEI Jing-Song. Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film[J]. Chin. Phys. Lett., 2012, 29(7): 128102
[12]	LI Yi-Gui, YANG Chun-Sheng, LIU Jing-Quan, SUGIYAMA Susumu . Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography**[J]. Chin. Phys. Lett., 2011, 28(3): 128102
[13]	LIANG Hui-Min, WANG Jing-Quan . Simulation of Interference Nanolithography of Second-Exciting Surface-Plasmon Polartions for Metal Nanograting Fabrication**[J]. Chin. Phys. Lett., 2011, 28(1): 128102
[14]	WANG Kai, LONG Hua, FU Ming, YANG Guang, LU Pei-Xiang, . Off-Resonant Third-Order Optical Nonlinearity of Au Nanoparticle Array by Femtosecond Z-scan Measurement[J]. Chin. Phys. Lett., 2010, 27(12): 128102
[15]	FENG Kan, LI Zheng. Buckling Analysis of Soft Nanostructure in Nanoimprinting[J]. Chin. Phys. Lett., 2009, 26(12): 128102

Viewed

Full text

Abstract