Electron Beam Lithographic Pixelated Micropolarizer Array for Real-Time Phase Measurement

doi:10.1088/0256-307X/31/11/114208

Chin. Phys. Lett.

2014, Vol. 31

Issue (11): 114208 DOI: 10.1088/0256-307X/31/11/114208

FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS)

Electron Beam Lithographic Pixelated Micropolarizer Array for Real-Time Phase Measurement

ZHANG Zhi-Gang¹, DONG Feng-Liang², CHENG Teng¹, QIAN Ke-Mao³, QIU Kang¹, ZHANG Qing-Chuan^1**, CHU Wei-Guo^2**, WU Xiao-Ping¹

¹CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Modern Mechanics, University of Science and Technology of China, Hefei 230027
²Nanofabrication Laboratory, National Center for Nanoscience and Technology, Beijing 100190
³School of Computer Engineering, Nanyang Technological University, Singapore 639798, Singapore

Cite this article:

ZHANG Zhi-Gang, DONG Feng-Liang, CHENG Teng et al 2014 Chin. Phys. Lett. 31 114208

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Abstract Pixelated micropolarizer arrays (PMAs) have recently been used as key components to achieve real-time phase measurement. PMA fabrication by electron beam lithography and inductively coupled plasma-reactive ion etching is proposed in this work. A 320×240 aluminum PMA with 7.4 μm pitch is successfully fabricated by the proposed technique. The period of the grating is 140 nm, and the polarization directions of each of the 2×2 units are 0°, 45°, 90°, and 135°. The scanning electron microscopy and optical microscopy results show that the PMA has a good surface characteristic and polarization performances. When the PMA is applied to phase-shifting interferometry, four fringe patterns of different polarization directions are obtained from only one single frame image, and then the object wave phase is calculated in real time.

Published: 28 November 2014

PACS:	42.87.Bg	(Phase shifting interferometry)
	42.25.Ja	(Polarization)
	81.16.Nd	(Micro- and nanolithography)

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https://cpl.iphy.ac.cn/10.1088/0256-307X/31/11/114208 OR https://cpl.iphy.ac.cn/Y2014/V31/I11/114208

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	ZHANG Zhi-Gang
	DONG Feng-Liang
	CHENG Teng
	QIAN Ke-Mao
	QIU Kang
	ZHANG Qing-Chuan
	CHU Wei-Guo
	WU Xiao-Ping

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