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Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by Dual Coplanar Counter Electrodes |
| FENG Zhao-Bin, LIU Duo** |
State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100
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| Cite this article: |
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FENG Zhao-Bin, LIU Duo 2013 Chin. Phys. Lett. 30 100701 |
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Abstract We achieve enhanced actuation of the 2nd-order resonance of a microcantilever in a capacitive microcantilever structure featured by a dual coplanar counter electrodes configuration. A torque about the static point of the 2nd eigenmode is generated in this configuration and therefore enables effective actuation of the 2nd-order resonance. It is further confirmed that the torque has the effect of suppressing the 1st-order resonance. As a result, the frequency response curve of the microcantilever beam can be modulated. Our results suggest that electric actuation of any higher-order resonances of the microcantilever can be realized through a rational design of counter electrodes.
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Received: 07 May 2013
Published: 21 November 2013
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| PACS: |
07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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07.10.Pz
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(Instruments for strain, force, and torque)
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46.40.Ff
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(Resonance, damping, and dynamic stability)
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