PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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Usage of Displaced Current in Langmuir Probe Measurement |
MING Zhang-Jian, LI Hong**, CHEN Zhi-Peng, LUO Chen, XIE Jin-Lin, LAN Tao, LIU A-Di, LIU Wan-Dong |
CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei 230026 |
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Cite this article: |
MING Zhang-Jian, LI Hong, CHEN Zhi-Peng et al 2012 Chin. Phys. Lett. 29 075201 |
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Abstract We investigate the possibility of the usage of displaced current in Langmuir probe measurement theoretically and experimentally. The displaced current flows through the self-generated or artificial capacitance of the reference electrode under an alternative sweep voltage. It can increase the total current afforded by the reference electrode, and eliminate the interference deriving from the finite plasma sheath resistance of the reference electrode. The results in both theory and experiment lead to the conclusion that the usage of displaced current is valid and more efficient with a floating probe method. This method is applied in some harsh plasma environments when the grounded chamber wall can easily be contaminated by the dielectric.
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Received: 23 February 2012
Published: 29 July 2012
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PACS: |
52.80.Yr
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(Discharges for spectral sources)
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