| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Enhancement Effect of Patterning Resolution Induced by an Aluminum Thermal Conduction Layer with AgInSbTe as a Laser Thermal Lithography Film |
| LI Hao1, WANG Rui1, GENG Yong-You1, WU Yi-Qun1,2**, WEI Jing-Song1 |
1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Key Lab of Functional Inorganic Material Chemistry (Ministry of Education), Heilongjiang University, Harbin 150080 |
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| Cite this article: |
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LI Hao, WANG Rui, GENG Yong-You et al 2012 Chin. Phys. Lett. 29 074401 |
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Abstract We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography. The patterns were fabricated by laser writing and wet-etching. The laser writing was conducted by a setup where the laser wavelength and the numerical aperture of the converging lens were 405 nm and 0.90, respectively. The wet-etching was carried out in a 17wt% ammonium sulfide solution. Experimental results indicate that the patterning resolution enhancement induced by an Al thermal conduction layer is more than 20% compared with that of the samples without an Al thermal conduction layer. The analysis reveals that the resolution-enhancing effect may be due to the changes of heat diffusion directions induced by the Al thermal conduction layer.
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Received: 21 February 2012
Published: 29 July 2012
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