FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Tunable Vertical-Cavity Surface-Emitting Lasers Integrated with Two Wafers |
REN Xiu-Juan, GUAN Bao-Lu, GUO Shuai, LI Shuo, LI Chuan-Chuan, HAO Cong-Xia, ZHOU Hong-Yi, GUO Xia**
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Key Laboratory of Opto-electronics Technology (Ministry of Education), Beijing University of Technology, Beijing 100124 |
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Cite this article: |
REN Xiu-Juan, GUAN Bao-Lu, GUO Shuai et al 2011 Chin. Phys. Lett. 28 024213 |
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Abstract A novel two-wafer concept for micro-electro-mechanically tunable vertical cavity surface emitting lasers (VCSELs) is presented. The VCSEL is composed by two wafers: one micro-electromechanical-system membrane wafer with four arms to adjust the cavity length through electrostatic actuation and a "half-VCSEL" wafer consisting of a fixed bottom mirror and an amplifying active region. The measurement results of the electricity pumped tunable VCSEL with more than 9 mW output power at room temperature over the tuning range prove the feasibility of the proposition.
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Keywords:
42.60.By
42.60.Lh
42.60.Fc
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Received: 11 October 2010
Published: 30 January 2011
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PACS: |
42.60.By
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(Design of specific laser systems)
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42.60.Lh
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(Efficiency, stability, gain, and other operational parameters)
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42.60.Fc
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(Modulation, tuning, and mode locking)
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