| PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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Diagnosis of Methane Plasma Generated in an Atmospheric Pressure DBD Micro-Jet by Optical Emission Spectroscopy |
| ZHANG Jun-Feng, BIAN Xin-Chao, CHEN Qiang, LIU Fu-Ping, LIU Zhong-Wei |
| Laboratory of Plasma Materials and Physics, Beijing Institute of Graphic Communication, Beijing 102600 |
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| Cite this article: |
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ZHANG Jun-Feng, BIAN Xin-Chao, CHEN Qiang et al 2009 Chin. Phys. Lett. 26 035203 |
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Abstract Diagnosis of methane plasma, generated in an atmospheric pressure dielectric barrier discharge (DBD) micro-plasma jet with a quartz tube as dielectric material by a 25kHz sinusoidal ac power source, is conducted by optical emission spectroscopy (OES). The reactive radicals in methane plasma such as CH, C2, and Hα are detected in-situ by OES. The possible dissociation mechanism of methane in diluted Ar plasma is deduced from spectra. In addition, the density of CH radical, which is considered as one of the precursors in diamond-like (DLC) film formation, affected by the parameters of input voltage and the feed gas flow rate, is emphasized. With the Boltzmann plots, four Ar atomic spectral lines (located at 675.28nm, 687.13nm, 738.40nm and 794.82nm, respectively) are chosen to calculate the electron temperature, and the dependence of electron temperature on discharge
parameters is also investigated.
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| Keywords:
52.70.-m
52.70.Kz
52.75.Hn
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Received: 01 July 2008
Published: 19 February 2009
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| PACS: |
52.70.-m
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(Plasma diagnostic techniques and instrumentation)
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52.70.Kz
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(Optical (ultraviolet, visible, infrared) measurements)
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52.75.Hn
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(Plasma torches)
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