| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Research of Plasma Characteristics of the Radio-Frequency Discharge in O2 and Its Mixtures |
| ZHANG Xue-Ling1, WANG Xin-Bing1, LI Guo-Fu2 |
| 1Wuhan National Laboratory for Optoelectronics, Institute of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 4300742Dalian Institute of Chemical Physics, Chinese Academy of Sciences, Dalian 116023 |
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| Cite this article: |
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ZHANG Xue-Ling, WANG Xin-Bing, LI Guo-Fu 2009 Chin. Phys. Lett. 26 024204 |
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Abstract Electron mean energy and the effects of gas mixture are studied theoretically and experimentally. The electron mean energy in O2 and its mixtures is obtained by solving Boltzmann's equation. The experiments of the Langmuir probe system and spectral analysis are carried out. It is shown that electron temperature goes down with the increasing pressure, narrowing pulse width and the addition of helium and argon. According to the intensity of oxygen atom at 777.19nm, xenon is more effective in inhibition of O2 decomposition than helium and argon.
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| Keywords:
42.55.Ks
52.70.-m
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Received: 01 September 2008
Published: 20 January 2009
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| PACS: |
42.55.Ks
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(Chemical lasers)
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52.70.-m
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(Plasma diagnostic techniques and instrumentation)
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