| Original Articles |
|
|
|
|
EELS INVESTIGATION ON RS a-SixC1-x: H ALLOY FILM |
| ZHANG Fang-qing;XU Xi-xiang;HE De-yan;CHEN Guang-hua |
| Department of Physics, Lanzhou University, Lanzhou |
|
| Cite this article: |
|
ZHANG Fang-qing, XU Xi-xiang, HE De-yan et al 1985 Chin. Phys. Lett. 2 241-244 |
|
|
|
Abstract EELS Technique is used to analyze the amorphous silicon-carbon-hydrogen alloy film deposited by RF sputtering method (RS a-SixC1-x: H). It is further verified that a structural change occurs at 1-x ≥ 0.40 in the alloy film.
|
|
|
Published: 01 June 1985
|
|
|
|
|
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
