| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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A Silicon Shallow-Ridge Waveguide Integrated Superconducting Nanowire Single Photon Detector Towards Quantum Photonic Circuits |
| Lingjie Yu1,2†, Heqing Wang3,4†, Hao Li3, Zhen Wang3, Yidong Huang1,2, Lixing You3**, Wei Zhang1,2** |
1Beijing National Research Center for Information Science and Technology, Beijing Innovation Center for Future Chips, Electronic Engineering Department, Tsinghua University, Beijing 100084
2Beijing Academy of Quantum Information Sciences, Beijing 100193
3State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
4University of Chinese Academy of Sciences, Beijing 100049
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| Cite this article: |
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Lingjie Yu, Heqing Wang, Hao Li et al 2019 Chin. Phys. Lett. 36 084202 |
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Abstract A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated. At the bias current of 11.6 $\mu$A, 4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps. This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
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Received: 08 May 2019
Published: 22 July 2019
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| PACS: |
42.50.-p
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(Quantum optics)
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42.82.-m
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(Integrated optics)
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74.78.-w
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(Superconducting films and low-dimensional structures)
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| Fund: Supported by the National Key R&D Program of China under Grant Nos 2017YFA0303704 and 2017YFA0304000, the National Natural Science Foundation of China under Grant Nos 61575102, 91750206, 61671438, 61875101 and 61621064, the Beijing Natural Science Foundation under Grant No Z180012, and the Beijing Academy of Quantum Information Sciences under Grant No Y18G26. |
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| [1] | Chen T Y et al 2010 Opt. Express 18 27217 | | [2] | Sun Q C et al 2016 Nat. Photon. 10 671 | | [3] | Liao S K et al 2017 Nature 549 43 | | [4] | Metcalf B J et al 2014 Nat. Photon. 8 770 | | [5] | Xiong C et al 2015 Optica 2 724 | | [6] | Santagati R, Silverstone J W, Strain M J, Sorel M, Miki S, Yamashita T, Fujiwara M, Sasaki M, Terai H, Tanner M G, Natarajan C M, Hadfield R H, O'Brien J L and Thompson M G 2017 J. Opt. 19 114006 | | [7] | Paesani S, Ding Y, Santagati R, Chakhmakhchyan L, Vigliar C, Rottwitt K, Oxenløwe L K, Wang J, Thompson M G and Laing A 2018 arXiv:1812.03158 | | [8] | Sibson P, Erven C, Godfrey M, Miki S, Yamashita T, Fujiwara M, Sasaki M, Terai H, Tanner M G, Natarajan C M, Hadfield R H, O'Brien J L and Thompson M G 2017 Nat. Commun. 8 13984 | | [9] | Gol'tsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C and Sobolewski R 2001 Appl. Phys. Lett. 79 705 | | [10] | Marsili F, Verma V B, Stern J A, Harrington S, Lita A E, Gerrits T, Vayshenker I, Baek B, Shaw M D, Mirin R P and Nam S W 2013 Nat. Photon. 7 210 | | [11] | Zhang W, You L, Li H, Huang J, Lv C, Zhang L, Liu X, Wu J, Wang Z and Xie X 2017 Sci. Chin. Phys. Mech. 60 120314 | | [12] | Zadeh I E, Los J W N, Gourgues R B M, Steinmetz V, Bulgarini G, Dobrovolskiy S M, Zwiller V and Dorenbos S N 2017 APL Photon. 2 111301 | | [13] | Zhang W J, Yang X Y, Li H, You L X, Lv C L, Zhang L, Zhang C J, Liu X Y, Wang Z and Xie X M 2018 Supercond. Sci. Technol. 31 035012 | | [14] | Shibata H, Shimizu K, Takesue H and Tokura Y 2015 Opt. Lett. 40 3428 | | [15] | Yang X Y, Li H, Zhang W J, You L X, Zhang L, Liu X Y, Wang Z, Peng W, Xie X M and Jiang M H 2014 Opt. Express 22 16267 | | [16] | Sprengers J P, Gaggero A, Sahin D, Jahanmirinejad S, Frucci G, Mattioli F, Leoni R, Beetz J, Lermer M, Kamp M, Höfling S, Sanjines R and Fiore A 2011 Appl. Phys. Lett. 99 181110 | | [17] | Pernice W H, Schuck C, Minaeva O, Li M, Goltsman G N, Sergienko A V and Tang H X 2012 Nat. Commun. 3 1325 | | [18] | Kahl O, Ferrari S, Kovalyuk V, Goltsman G N, Korneev A and Pernice W H P 2015 Sci. Rep. 5 10941 | | [19] | Rath P, Kahl O, Ferrari S, Sproll F, Lewes-Malandrakis G, Brink D, Ilin K, Siegel M, Nebel C and Pernice W 2015 Light: Sci. Appl. 4 e338 | | [20] | Schuck C, Guo X, Fan L, Ma X, Poot M and Tang H X 2016 Nat. Commun. 7 10352 | | [21] | Sibson P, Kennard J E, Stanisic S, Erven C, O'Brien J L and Thompson M G 2017 Optica 4 172 | | [22] | Vlasov Y A and McNab S J 2004 Opt. Express 12 1622 | | [23] | Dong P, Qian W, Liao S, Liang H, Kung C C, Feng N N, Shafiiha R, Fong J, Feng D and Krishnamoorthy A V 2010 Opt. Express 18 14474 | | [24] | Annunziata A J, Quaranta O, Santavicca D F, Casaburi A, Frunzio L, Ejrnaes M, Rooks M J, Cristiano R, Pagano S, Frydman A and Prober D E 2010 J. Appl. Phys. 108 084507 | | [25] | Zhang C, Sun J H, Xiao X, Sun W M, Zhang X J, Chu T, Yu J Z and Yu Y D 2013 Chin. Phys. Lett. 30 014207 |
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