| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
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Effect of Bias Voltage on Microstructure and Mechanical Properties of Nanocomposite ZrCN Films Deposited by Filtered Cathodic Vacuum Arc |
| Han Zhou, Fu-Zeng Zhou, Yong-Qing Shen, Bin Liao, Jing-Jing Yu, Xu Zhang** |
College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875
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| Cite this article: |
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Han Zhou, Fu-Zeng Zhou, Yong-Qing Shen et al 2018 Chin. Phys. Lett. 35 066202 |
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Abstract Nanocomposite ZrCN films consisting of nanocrystalline ZrCN grains embedded in nitrogen-doped amorphous carbon film are deposited by filtered cathodic vacuum arc technology under different bias voltages ranging from 50 to 400 V. The influence of bias voltage on the characterization and the mechanical properties of the ZrCN films are investigated by x-ray diffraction, x-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, Raman spectroscopy and nano-indentation. The bias voltage has a subtle effect on the ZrCN grain size, which is around 9.5 nm and keeps almost constant. A slight increase of the bias voltage induces a relatively high $sp^{3}$ fraction about 40% in N-doped amorphous C films but leads to the graphitization of the films under a higher voltage. The best mechanical property of the ZrCN film with the hardness of 41 GPa is obtained under the bias voltage of 200 V, indicating the positive effect of slight increase of ion bombardment on the hardness of the films.
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Received: 18 December 2017
Published: 19 May 2018
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| PACS: |
62.25.-g
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(Mechanical properties of nanoscale systems)
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52.77.Dq
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(Plasma-based ion implantation and deposition)
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| Fund: Supported by the National Natural Science Foundation of China under Grant No 51171028. |
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