| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Optical and Electrical Properties Evolution of Diamond-Like Carbon Thin Films with Deposition Temperature |
| DING Xu-Li1, LI Qing-Shan1,2, KONG Xiang-He1 |
| 1College of Physics and Engineering, Qufu Normal University, Qufu 2731652Department of Physics, Ludong University, Yantai 264025 |
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| Cite this article: |
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DING Xu-Li, LI Qing-Shan, KONG Xiang-He 2009 Chin. Phys. Lett. 26 027802 |
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Abstract Optical and electrical properties of diamond-like carbon (DLC) films deposited by pulsed laser ablation of graphite target at different substrate temperatures are reported. By varying the deposition temperature from 400 to 25°C, the film optical transparency and electrical resistivity increase severely. Most importantly, the transparency and resistivity properties of the DLC films can be tailored to approaching diamond by adjusting the deposition temperature, which is critical to many applications. DLC films deposited at low temperatures show excellent optical transmittance and high resistivity. Over the same temperature regime an increase of the sp3 bonded C content is observed using visible Raman spectroscopy, which is responsible for the enhanced transparency and resistivity properties
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| Keywords:
78.40.Ri
81.05.Gc
81.15.Fg
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Received: 27 October 2008
Published: 20 January 2009
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| PACS: |
78.40.Ri
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(Fullerenes and related materials)
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81.05.Gc
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(Amorphous semiconductors)
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81.15.Fg
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(Pulsed laser ablation deposition)
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