| PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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Diagnostics of Metal Plasma in Radio Frequency Glow Discharge during Electron Beam Evaporation |
| YU Yong-Hao1**, WANG Lang-Ping2**, WANG Xiao-Feng2, JIANG Wei2, CHEN Qiong2 |
1Academy of Fundamental and Interdisciplinary Science, Harbin Institute of Technology, Harbin 150001
2State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001
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| Cite this article: |
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YU Yong-Hao, WANG Lang-Ping, WANG Xiao-Feng et al 2015 Chin. Phys. Lett. 32 085201 |
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Abstract A new method for generating metal plasma via radio frequency (rf) glow discharge during electron beam evaporation is proposed. A probe array and an emission spectrometric analysis are employed to identify the metal plasma during rf glow discharge. Spectral results reveal that the Ti metal vapor is ionized and forms a metal plasma via rf glow discharge. The dependence of the emission intensities of Ti+ and Ti atoms on rf glow discharge parameters is investigated. The results show that, as rf power increases, the emission intensities of Ti+ are enhanced while the emission intensities of Ti atoms are suppressed due to a constant Ti atom flux and an increasing Ti+ flux. Furthermore, the emission intensities of Ti+ and Ti atoms increase with the electron-beam current. The influence of rf glow discharge parameters on the ion-beam current density is also studied. The results show that the ion-beam current density rises with increasing the rf power and the electron-beam current. The ion-beam current density at 4-cm radial distance doubles from 8×109/cm3 up to 1.7×1010/cm3 with increasing the rf power from 90 to 240 W and it increases almost five-fold in the electron-beam current range of 170–230 mA at 10-cm radial distance. Additionally, the increasing ratio of the ion-beam current density at the large radial distance is greater than that in the central region resulting from the driving force which is brought about by a pressure difference and the discharging action.
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Received: 02 April 2015
Published: 02 September 2015
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| PACS: |
52.25.Jm
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(Ionization of plasmas)
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52.80.Pi
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(High-frequency and RF discharges)
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52.50.Qt
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(Plasma heating by radio-frequency fields; ICR, ICP, helicons)
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52.70.Gw
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(Radio-frequency and microwave measurements)
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