A Novel Fabrication Method for Flexible SOI Substrate Based on Trench Refilling with Polydimethylsiloxane

doi:10.1088/0256-307X/30/8/086201

Chin. Phys. Lett.

2013, Vol. 30

Issue (8): 086201 DOI: 10.1088/0256-307X/30/8/086201

CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES

A Novel Fabrication Method for Flexible SOI Substrate Based on Trench Refilling with Polydimethylsiloxane

ZHANG Cang-Hai, YANG Yi, WANG Yu-Feng, ZHOU Chang-Jian, SHU Yi, TIAN He, REN Tian-Ling^**

Institute of Microelectronics, Tsinghua University, Beijing 100084 Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084

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ZHANG Cang-Hai, YANG Yi, WANG Yu-Feng et al 2013 Chin. Phys. Lett. 30 086201

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Abstract Flexible arrays based on the flexible connection of double layers are demonstrated. Flexible sensor arrays are highly desired for many applications. Conventional flexible electronics are implemented by directly fabricating them on organic flexible substrates such as polyimide or polyethylene terephthalate, or forming on rigid substrates and then transferring them onto elastomeric substrates. For the first time, a novel process method based on trench refilling with polydimethylsiloxane to make flexible arrays is proposed. In this method, the sensors are directly fabricated on islands of the final bulk silicon. The performance of the sensor will not to be effected by bending and stretching operations. A one-dimensional flexible array shows good flexibility. Since the flexibility process is the last fabrication step, this method is compatible with many micro-electro-mechanical system fabrication technologies and has good yield.

Received: 15 April 2013 Published: 21 November 2013

PACS:	62.20.D-	(Elasticity)
	62.20.M-	(Structural failure of materials)
	61.90.+d	(Other topics in structure of solids and liquids; crystallography)

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https://cpl.iphy.ac.cn/10.1088/0256-307X/30/8/086201 OR https://cpl.iphy.ac.cn/Y2013/V30/I8/086201

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	ZHANG Cang-Hai
	YANG Yi
	WANG Yu-Feng
	ZHOU Chang-Jian
	SHU Yi
	TIAN He
	REN Tian-Ling

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