| CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
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Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding |
| LI Yi-Gui1**, SUN Jian1, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2, TANAKA Katsuhiko2
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1Institute of Key Laboratory for Thin Film and Microfabrication Technology (Ministry of Education), Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240
2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
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| Cite this article: |
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LI Yi-Gui, SUN Jian, YANG Chun-Sheng et al 2011 Chin. Phys. Lett. 28 068103 |
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Abstract A lead zirconate titanate(PZT)-Si energy harvester cantilever with PZT bulk ceramics is fabricated by eutectic bonding, polishing and dicing processes. The feasibility of this process is studied using a successful operation of the cantilever in both actuation and harvesting modes. The first prototype made from a PZT-Au-Si cantiliever is tested. The testing results show the voltage output of 632 mV at the frequency of 815 Hz when the excitation acceleration is 0.5 g. The PZT and silicon layers are bonded together to form a sandwiched structure using a gold layer as an intermediate layer.
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| Keywords:
81.20.Wk
85.85.+j
81.16.Rf
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Received: 09 October 2010
Published: 29 May 2011
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| PACS: |
81.20.Wk
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(Machining, milling)
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85.85.+j
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(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
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81.16.Rf
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(Micro- and nanoscale pattern formation)
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