Chin. Phys. Lett.  2011, Vol. 28 Issue (10): 104212    DOI: 10.1088/0256-307X/28/10/104212
FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
Fast Evaluation of Aberration-Induced Intensity Distribution in Partially Coherent Imaging Systems by Cross Triple Correlation
LIU Shi-Yuan1,2**, LIU Wei1, WU Xiao-Fei2
1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074
2State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074
Cite this article:   
LIU Shi-Yuan, LIU Wei, WU Xiao-Fei 2011 Chin. Phys. Lett. 28 104212
Download: PDF(502KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract We propose a method suitable for the fast calculation and evaluation of aberration-induced intensity distribution in partially coherent imaging systems, such as projection lithographic tools. The method is based on transmission cross coefficient (TCC) decomposition by a general operator, namely cross triple correlation (CTC). By expanding the aberrated pupil function into a Taylor series, the TCC is decomposed into different terms. Each term is further represented as a weighted sum of several CTCs. By exploring the properties of CTC, the aerial image intensity induced by wavefront aberration is calculated quickly and separated clearly from that without aberration. Simulation results and discussion are presented.
Keywords: 42.30.Va      42.15.Fr      42.30.Lr      85.40.Hp     
Received: 30 March 2011      Published: 28 September 2011
PACS:  42.30.Va (Image forming and processing)  
  42.15.Fr (Aberrations)  
  42.30.Lr (Modulation and optical transfer functions)  
  85.40.Hp (Lithography, masks and pattern transfer)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/10.1088/0256-307X/28/10/104212       OR      https://cpl.iphy.ac.cn/Y2011/V28/I10/104212
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
LIU Shi-Yuan
LIU Wei
WU Xiao-Fei
[1] Smith B W and Schlief R 2000 Proc. SPIE 4000 294
[2] Yuan Q Y, Wang X Z, Qiu Z C, Wang F, Ma M Y and He L 2007 Opt. Express 15 15878
[3] Liu W, Liu S Y, Zhou T T and Wang L J 2009 Opt. Express 17 19278
[4] Liu W, Liu S Y, Shi T L and Tang Z R 2010 Opt. Express 18 20096
[5] Saleh B E A 1979 Opt. Acta 26 777
[6] Kintner E C 1978 Appl. Opt. 17 2747
[7] Yamazoe K 2010 J. Opt. Soc. Am. A 27 1311
[8] Liu S Y, Liu W and Zhou T T 2011 J. Micro/Nanolith. MEMS MOEMS 10 023007
[9] Flagello D G, Klerk J, Davies G, Rogoff R, Geh B, Arnz M, Wegmann U and Kraemer M 1997 Proc. SPIE 3051 672
[10] Lohmann A W and Wirnitzer B 1984 Proc. IEEE 72 889
[11] Hopkins H H 1953 Proc. R. Soc. London A 217 408
[12] Zernike F 1934 Physica 1 689
[13] Yu P, Qiu W and Pan D Z 2008 IEEE Trans. Semicond. Manuf. 21 638
[14] Pati Y C and Kailath T 1994 J. Opt. Soc. Am. A 11 2438
Related articles from Frontiers Journals
[1] WANG Chun-Fang, BAI Yan-Feng, GUO Hong-Ju, CHENG Jing. Beam Splitting in Induced Inhomogeneous Media[J]. Chin. Phys. Lett., 2012, 29(6): 104212
[2] WU Wen-Han,HUANG Xi,YU Yu**,ZHANG Xin-Liang. RZ-DQPSK Signal Amplitude Regeneration Using a Semiconductor Optical Amplifier[J]. Chin. Phys. Lett., 2012, 29(4): 104212
[3] JIANG Ming, TANG Min-Jin, WU Hao, LI Yan-Jie, XIE Hui-Min. FIB Moiré Gratings and Their Application in the Measurement of Optical Fibers' Mechanical Properties[J]. Chin. Phys. Lett., 2012, 29(3): 104212
[4] CAO Bin**, ZHANG Chun-Xi, OU Pan, LIN Zhi-Li, SUN Ming-Jie. Two-Detector Arbitrary Nth-Order HBT-Type Ghost Diffraction[J]. Chin. Phys. Lett., 2012, 29(1): 104212
[5] CHEN De-Liang, CAO Yi-Ping**, HUANG Zhen-Fen . Theoretical Explanation and Improvement to the Flare Model of Lithography Based on the Kirk Test[J]. Chin. Phys. Lett., 2011, 28(6): 104212
[6] ZHANG Zheng, PAN Di, YU Yu**, ZHANG Xin-Liang . All-Optical Format Conversion from RZ-DPSK to NRZ-DPSK at 40Gbit/s[J]. Chin. Phys. Lett., 2011, 28(5): 104212
[7] GE Jing-Jing**, WANG Zhao-Qi . Luminance Effects on Neural Mechanism at Photopic Level[J]. Chin. Phys. Lett., 2011, 28(5): 104212
[8] ZHAO Sheng-Mei**, DING Jian, DONG Xiao-Liang, ZHENG Bao-Yu . Ghost Imaging Using Orbital Angular Momentum[J]. Chin. Phys. Lett., 2011, 28(12): 104212
[9] WANG Xin-Wei**, ZHOU Yan, FAN Song-Tao, LIU Yu-Liang . Temporal Parameter Optimization in Four-Dimensional Flash Trajectory Imaging[J]. Chin. Phys. Lett., 2011, 28(11): 104212
[10] ZHANG Yi-Zhuo, WANG Da-Yong, **, WANG Yun-Xin, TAO Shi-Quan . Automatic Compensation of Total Phase Aberrations in Digital Holographic Biological Imaging[J]. Chin. Phys. Lett., 2011, 28(11): 104212
[11] ZHU Jing-Yi, LIU Ben-Kang, WANG Yan-Qiu, HE Hai-Xiang, WANG Li. Dynamics of H2 in Intense Femtosecond Laser Field[J]. Chin. Phys. Lett., 2010, 27(9): 104212
[12] WANG Xin-Wei, ZHOU Yan, FAN Song-Tao, HE Jun, LIU Yu-Liang. Range-Gated Laser Stroboscopic Imaging for Night Remote Surveillance[J]. Chin. Phys. Lett., 2010, 27(9): 104212
[13] GE Jing-Jing, WANG Zhao-Qi, WANG Yan, ZHAO Kan-Xing. Characteristics and New Measurement Method of NCSFs of Individual Color Mechanisms of Human Vision[J]. Chin. Phys. Lett., 2010, 27(5): 104212
[14] LV Shi-Long, SONG Zhi-Tang, LIU Yan, FENG Song-Lin. Nanoscale Tapered Pt Bottom Electrode Fabricated by FIB for Low Power and Highly Stable Operations of Phase Change Memory[J]. Chin. Phys. Lett., 2010, 27(2): 104212
[15] XU Xian-Feng, CAI Lu-Zhong, WANG Yu-Rong, LI Dai-Lin. Accurate Phase Shift Extraction for Generalized Phase-Shifting Interferometry[J]. Chin. Phys. Lett., 2010, 27(2): 104212
Viewed
Full text


Abstract