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Fabrication of Dry Electrode for Recording Bio-potentials |
| WANG Yu1,2, GUO Kai2, PEI Wei-Hua2**, GUI Qiang2, LI Xiao-Qian2, CHEN Hong-Da2, YANG Jian-Hong1
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1Institute of Microelectronics, School of Physical Science and Technology, Lanzhou University, Lanzhou 730000
2State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
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| Cite this article: |
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WANG Yu, GUO Kai, PEI Wei-Hua et al 2011 Chin. Phys. Lett. 28 010701 |
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Abstract Development of minimally invasive dry electrodes for recording biopotentials is presented. The detailed fabrication process is outlined. A dry electrode is formed by a number of microneedles. The lengths of the microneedles are about 150 μm and the diameters are about 50 μm. The tips of the microneedles are sharp enough to penetrate into the skin. The silver/silver chloride is grown on microneedle arrays and demonstrates good character. The electrocardiogram shows that the dry electrode is suitable for recording biopotentials.
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| Keywords:
07.07.Df
07.10.Cm
68.55.Jk
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Received: 04 February 2010
Published: 23 December 2010
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| PACS: |
07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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07.10.Cm
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(Micromechanical devices and systems)
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68.55.Jk
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