| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers |
XIAO Xi, ZHU Yu, XU Hai-Hua, ZHOU Liang, HU Ying-Tao, LI Zhi-Yong, LI Yun-Tao, YU Yu-De, YU Jin-Zhong |
| State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P.O. Box 912, Beijing 100083 |
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| Cite this article: |
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XIAO Xi, ZHU Yu, XU Hai-Hua et al 2010 Chin. Phys. Lett. 27 094207 |
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Abstract A wafer-level testable silicon-on-insulator-based microring modulator is demonstrated with high modulation speed, to which the grating couplers are integrated as the fiber-to-chip interfaces. Cost-efficient fabrications are realized with the help of optical structure and etching depth designs. Grating couplers and waveguides are patterned and etched together with the same slab thickness. Finally we obtain a 3-dB coupling bandwidth of about 60 nm and 10 Gb/s nonreturn-to-zero modulation by wafer-level optical and electrical measurements.
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| Keywords:
42.82.-m
85.60.Bt
42.82.Et
42.60.Da
42.79.Hp
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Received: 12 April 2010
Published: 25 August 2010
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| PACS: |
42.82.-m
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(Integrated optics)
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85.60.Bt
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(Optoelectronic device characterization, design, and modeling)
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42.82.Et
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(Waveguides, couplers, and arrays)
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42.60.Da
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(Resonators, cavities, amplifiers, arrays, and rings)
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42.79.Hp
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(Optical processors, correlators, and modulators)
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