| CONDENSED MATTER: STRUCTURE, MECHANICAL AND THERMAL PROPERTIES |
|
|
|
|
The Influence of Au-Doping on Morphology and Visible-Light Reflectivity of TiN Thin Films Deposited by Direct-Current Reactive Magnetron Sputtering |
NA Yuan-Yuan, WANG Cong, LIU Yu
|
| Center for Condensed Matter and Materials Physics, Department of Physics, Beihang University, Beijing 100191 |
|
| Cite this article: |
|
NA Yuan-Yuan, WANG Cong, LIU Yu 2010 Chin. Phys. Lett. 27 056802 |
|
|
|
Abstract Ti, TiN and Au-TiN (Au content: from 0.5% to 7.7%) thin films were deposited on stainless steel substrates by dc reactive magnetron sputtering with a metal Ti target. The crystal structure, surface morphology and visible-light reflectivity of the films for different film compositions are studied in detail. Distinctly different surface morphologies appear for the Ti, TiN and Au-TiN thin films. It can be observed that the surface morphology of the TiN film is affected by the Au-doping, when the Au content increases from 0% to 7.7%, surface roughness enlarges from 62.4 to 82.8 nm. Moreover, visible-light reflectivity varies significantly with increasing Au contents in the TiN films. However, the reflectivity of the TiN thin film at 550-800 nm is higher than that of the Au-TiN thin film. The present work illustrates the dependence of metal elements on the surface morphology and on the reflectivity of Au-TiN thin films. It is speculated that the addition of Au can suppress the formation and growth of TiN grains so that it changes the surface morphology and the Au-TiN thin film has potential applications in spectral selective coating.
|
| Keywords:
68.55.-a
78.40.-q
|
|
|
Received: 26 November 2009
Published: 23 April 2010
|
|
| PACS: |
68.55.-a
|
(Thin film structure and morphology)
|
| |
78.40.-q
|
(Absorption and reflection spectra: visible and ultraviolet)
|
|
|
|
|
|
[1] Omura Y, Inokawa H and Izumi K 1991 J. Mater. Res. 6 1238
[2] Tohru H, Akira Y et al 1991 Jpn. J. Appl. Phys. I 30 1447
[3] Glass R C et al 1992 J. Vac. Sci. Technol. A 10 1625
[4] Patsalas P, Charitidis C, Logothetidis S, Dimitriadis C A and Valassiades O 1999 J. Appl. Phys. 86 5296
[5] Glocker D A, Shah S I and Westwood W D 1995 Handbook of Thin Film Process Technology (Bristol: IOP Publishing) chap X pX1.1
[6] Randhawa H 1988 Surf. Coat. Technol. 36 829
[7] Kobeda E, Warnock J D, Gambino J P, Brodsky S B, Cunningham B and Basavaiah S 1992 J. Appl. Phys. 72 2743
[8] Grigorov G I and Martev I N 1986 Thin Solid Films 137 177
[9] Midori K, Yoshio A and Katsutaka S 1998 J. Vac. Sci. Technol. A: Vac. Surf. Films 16 200
[10] Smith G B, David A B and Swift P D 2001 Renew. Energy 22 79
[11] Vaz F, Cerqueira P, Rebouta L, Nascimento S M C et al 2004 Thin Solid Films 447--448 449
[12] Chawla V, Jayaganthan R and Chandra R 2008 Mater. Charact. 59 1015
[13] Barhai P K, Kumari N, Banerjee I, Pabi S K and Mahapatra S K 2010 Vacuum 84 896
[14] Carpenter S and Kelly P J 2009 Surf. Coat. Technol. 204 923
[15] Liu T W, Deng X L, Wang X Y, Wang Y M, Zou J X and Dong C 2004 Chin. Phys. Lett. 21 2008
[16] Li W, Ma Z Q, Wang Y and Wang D M 2006 Chin. Phys. Lett. 23 178
[17] Liu E W, Fan S H, Li L, Lü G H, Feng W R, Zhang G L and Yang S Z 2006 Chin. Phys. Lett. 23 1533
[18] Jeyachandran Y L et al 2007 Mater. Sci. Eng. A 445--446 223
[19] Sandu C S et al 2006 Thin Solid Films 496 336
[20] Bourbia O, Achour S, Tabet N, Parlinska M and Harabi A 2007 Thin Solid Films 515 6758
[21] Kelly P J, Li H, Whitehead K A, Verran J, Arnell R D and Iordanova I 2009 Surf. Coat. Technol. 204 923
[22] Wang W, Qian S Q and Zhou X Y 2009 Trans. Nonferrous Met. Soc. Chin. 19 1180
[23] Barnes J P, Petford-Long A K, Doole R C, Serna R, Gonzalo J, Suarez G A, Afonso C N and Hole D 2002 Nanotechnology 13 465
[24] Wang L W, Xu Z, Meng L J, Vasco Teixeira, Song S G and Xu X R 2009 Chin. Phys. Lett. 26 077801
[25] Spencer A G, Georgson M, Bishop C A, Stenberg E and Howson R P 1988 Sol. Energy Mater. Sol Cells 18 87
[26] Georgson M, Roos A and Ribbing C G 1991 J. Vac. Sci. Technol. A: Vac. Surf. Films 9 2191
[27] Andersson K E, Wahlstrom M K and Roos A 1992 Thin Solid Films 214 213
[28] Sun D M and Sun Z Q 2004 Application of Cermet Thin Film in Technology of Phoelectron. (Beijing: Science Press) chap 1 p 17 (in Chinese)
[29] Huang J M and Xu C J 2005 Acta Opt. Sin. 25 1293 (in Chinese)
[30] Jiang P and Xu Z Z 2000 Solid Physics Concise Course (Shanghai: Fudan University) chap 7 p206 (in Chinese)
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
