| FUNDAMENTAL AREAS OF PHENOMENOLOGY(INCLUDING APPLICATIONS) |
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Analysis of Optical Readout Sensitivity for Uncooled Infrared Detector |
| CHENG Teng1, ZHANG Qing-Chuan1, JIAO Bin-Bin2, CHEN Da-Peng2, WU Xiao-Ping1 |
| 1CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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| Cite this article: |
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CHENG Teng, ZHANG Qing-Chuan, JIAO Bin-Bin et al 2009 Chin. Phys. Lett. 26 124206 |
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Abstract An optical readout uncooled infrared detector, employing a substrate-free focal plane array with pitch size 60μm, is established. The reflector deformation induced by the stress mismatching of the bi-layer structure is discussed and, in turn, a universal solution to determine both the optical readout sensitivity and the optimal filter position is found. By applying this solution, the optical readout sensitivity for the ideal plane reflector could theoretically increase by 80% as compared with the conventional operation, and the sensitivity loss caused by the reflector deformation can also be reduced to a reasonable level.
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| Keywords:
42.30.Kq
42.79.Pw
85.60.Gz
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Received: 17 June 2009
Published: 27 November 2009
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| PACS: |
42.30.Kq
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(Fourier optics)
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42.79.Pw
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(Imaging detectors and sensors)
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85.60.Gz
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(Photodetectors (including infrared and CCD detectors))
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