Chin. Phys. Lett.  2008, Vol. 25 Issue (2): 743-746    DOI:
Original Articles |
Determination of Thickness and Optical Constants of ZnO Thin Films Prepared by Filtered Cathode Vacuum Arc Deposition

WANG Ming-Dong1;ZHU Dao-Yun2;LIU Yi3;ZHANG Lin1;ZHENG Chang-Xi1;HE Zhen-Hui1;CHEN Di-Hu1;WEN Li-Shi1

1State Key Laboratory of Optoelectronic Materials and Technologies, and Department of Physics, School of Physics and Engineering, Sun Yat-Sen University, Guangzhou 5102752Experiment Center, Guangdong University of Technology, Guangzhou 5100903School of Physical Science, Shenzhen University, Shenzhen 518060
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WANG Ming-Dong, ZHU Dao-Yun, LIU Yi et al  2008 Chin. Phys. Lett. 25 743-746
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Abstract ZnO thin films are prepared on glass substrates by filtered cathode vacuum arc (FCVA) deposition technique. A new method is demonstrated to extract the refractive index, thickness and optical band gap of ZnO thin films from the
transmission spectrum alone. The refractive index is calculated from the extremes of the interference fingers. The transmission spectrum is divided into two terms, non-interference term and interference effect term. The thickness of thin films is calculated by simulating the interference term, and the non-interference term is used to calculate optical band gap with the gained thickness. The results are compared with measurements by using an ellipsometry and a scanning electron microscope.
Keywords: 81.15.Jj      78.66.Hf      68.55.Jk     
Received: 04 April 2007      Published: 30 January 2008
PACS:  81.15.Jj (Ion and electron beam-assisted deposition; ion plating)  
  78.66.Hf (II-VI semiconductors)  
  68.55.Jk  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2008/V25/I2/0743
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WANG Ming-Dong
ZHU Dao-Yun
LIU Yi
ZHANG Lin
ZHENG Chang-Xi
HE Zhen-Hui
CHEN Di-Hu
WEN Li-Shi
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