Chin. Phys. Lett.  2008, Vol. 25 Issue (2): 632-635    DOI:
Original Articles |
Comparison between Dual Radio Frequency- and Pulse-Driven Sheath near Insulating Substrates
DAI Zhong-Ling;LIU Chuan-Sheng;WANG You-Nian
State Key Laboratory of Materials Modification, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024
Cite this article:   
DAI Zhong-Ling, LIU Chuan-Sheng, WANG You-Nian 2008 Chin. Phys. Lett. 25 632-635
Download: PDF(1265KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract We carry out a comparison between the characteristics of radio frequency- and pulse-sheath near insulating substrates driven by dual frequency (DF) sources making use of the fluid model in which the self-bias voltage on the electrode is obtained consistently under a current balance condition. The results show that the combination of the higher and lower frequency source
modulate the characteristics of the radio-frequency- and pulse-sheath: the higher frequency makes the physical quantities oscillate fast while the slow oscillating contour of variation in physical quantities is modulated by the lower frequency source. However, there are some differences between the capacity of mitigating the charging effects on the surface of the insulator, i.e., the pulsed driven plasma gains an advantage over the radio-frequency driven one because the `off' state of the pulse allow more electrons to reach the insulating surface to neutralize the positive charge due to the incident ion as the pulse being in the pulse's duty. In addition, the ion energy distribution (IED) bombarding the surface of the insulator has a range of energy for the
radio-frequency bias while that for the pulse bias is discontinuous.
Keywords: 52.65.Kj      52.40.Kh     
Received: 29 November 2007      Published: 30 January 2008
PACS:  52.65.Kj (Magnetohydrodynamic and fluid equation)  
  52.40.Kh (Plasma sheaths)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2008/V25/I2/0632
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
DAI Zhong-Ling
LIU Chuan-Sheng
WANG You-Nian
[1] Dai Z L and Wang Y N 2003 Surf. Coat. Technol. 165 224
[2] Soss S R, Cook C A and Lu T -M 1995 J. Appl. Phys. 77 2735
[3] Barnat E V and Lu T -M 1999 J. Vac. Sci. Technol. A 17 3322
[4] Hass F A 2004 J. Phys. D: Appl. Phys. 37 3117
[5] Myers F R and Cale T S 1992 J. Electrochem. Soc. 139 3587
[6] Shannon S, Hoffman D, Yang J -G, Paterson A and Holland J 2005 J. Appl. Phys. 97 103304
[7] Robiche J, Boyle P C, Turner M M and Ellingboe A R 2003 J. Phy.D: Appl. Phys. 36 1810
[8] Boyle P C, Robiche J and Turner M M 2004 J. Phy. D: Appl.Phys. 37 1451
[9] Chung T H 2005 Phys. Plasma 12 104503
[10] Kim H C and Lee J K 2005 J. Vac. Sci. Technol. A 23 651
[11] Denpoh K, Wakayamal G and Nanbul K 2004 Jpn. J. Appl.Phys. 43 5533
[12] Chung T H 2005 Phys. Plasma 12 104503
[13] Jiang W, Mao M and Wang Y N 2006 Phys. Plasma 13 113502
[14] Guan Z Q, Dai Z L and Wang Y N 2005 Phys. Plasma 12123502
[15] Dai Z L, Xu X and Wang Y N 2007 Phys. Plasma 14 013507
[16] Yagisawa T, Maeshige K, Shimada T and Makabe T 2004 IEEE Trans.Plasma Sci. 32 90
[17] Yagisawa T and Makabe T 2003 IEEE Trans. Plasma Sci. 31521
[18] Wang L H, Dai Z L and Wang Y N 2006 Chin. Phys. Lett. 23668
[19] Goto H H, Lowe H -D and Ohmi T 1992 J. Vac. Sci.Technol. A 10 3048
[20] Goto H H, Lowe H -D and Ohmi T 1993 IEEE Trans.Semicond. Manuf. 6 58
[21] Lieberman M A and Lichtenberg A J 2005 Principles of PlasmaDischarges and Materials Processing (New York: Wiley) chap 11 p 416
[22] Dai Z L, Wang Y N and Ma T C 2002 Phys. Rev. E 65 036403
Related articles from Frontiers Journals
[1] OUYANG Ji-Ting, DUAN Xiao-Xi, XU Shao-Wei, HE Feng. The Key Factor for Uniform and Patterned Glow Dielectric Barrier Discharge[J]. Chin. Phys. Lett., 2012, 29(2): 632-635
[2] DAI Zhong-Ling, WANG You-Nian** . Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model[J]. Chin. Phys. Lett., 2011, 28(7): 632-635
[3] LI Bo, **, CHEN Yan-Jun, LI Xing . Standing Shocks in the Inner Slow Solar Wind[J]. Chin. Phys. Lett., 2011, 28(5): 632-635
[4] HAO Mei-Lan, DAI Zhong-Ling, WANG You-Nian. Simulation of Dual Frequency Capacitive Sheath over a Concave Electrode in Low Pressure[J]. Chin. Phys. Lett., 2009, 26(12): 632-635
[5] LIU Yu, DAI Zhong-Ling, WANG You-Nian. Dust Particle Properties in a Dual-Frequency Driven Sheath[J]. Chin. Phys. Lett., 2008, 25(4): 632-635
[6] SUN Ji-Zhong, WANG Qi, ZHANG Jian-Hong, WANG Yan-Hui, WANG De-Zhen. Self-Consistent Model for Atmospheric Pressure Dielectric Barrier Discharges in Helium[J]. Chin. Phys. Lett., 2008, 25(11): 632-635
[7] GAN Bao-Xia, CHEN Yin-Hua. Oscillations of Magnetized Dust Grains in Plasma Sheath with Negative Ions[J]. Chin. Phys. Lett., 2007, 24(7): 632-635
[8] HE Hong-Da, DONG Jia-Qi, ZHANG Jin-Hua, JIANG Hai-Bin. Hybrid Method for Tokamak MHD Equilibrium Configuration Reconstruction[J]. Chin. Phys. Lett., 2007, 24(2): 632-635
[9] NING Cheng, DING Ning, LIU Quan, YANG Zhen-Hua, FAN Wen-Bin, ZHANG Yang. Simulation of Z-Pinch Processes of Nested Tungsten Wire-Array on Angara-5-1 Facility[J]. Chin. Phys. Lett., 2006, 23(7): 632-635
[10] TAN Chang, LIU Yue, WANG Xiao-Gang, MA Teng-Cai. Numerical Simulation on Expansion Process of Ablation Plasma Induced by Intense Pulsed Ion Beam[J]. Chin. Phys. Lett., 2006, 23(6): 632-635
[11] WANG Li-Hong, DAI Zhong-Ling, WANG You-Nian. Investigation of Dual Radio-Frequency Driven Sheaths and Ion Energy Distributions Bombarding an Insulating Substrate[J]. Chin. Phys. Lett., 2006, 23(3): 632-635
[12] ZOU Xiu. Characteristics of Dust Plasma Sheath in an Oblique Magnetic Field[J]. Chin. Phys. Lett., 2006, 23(2): 632-635
[13] FENG Shi-De, DONG Ping, ZHONG Lin-Hao. A Lattice Boltzmann Model for Two-Dimensional Magnetohydrodynamics[J]. Chin. Phys. Lett., 2006, 23(10): 632-635
[14] ZHANG Yuan-Tao, WANG De-Zhen, WANG Yan-Hui, LIU Cheng-Sen. Radial Evolution of the Atmospheric Pressure Glow Discharge in Helium Controlled by Dielectric Barrier[J]. Chin. Phys. Lett., 2005, 22(1): 632-635
[15] YANG Hong-Ang, JIN Shu-Ping. Effects of Hall Current in the Driven Reconnection with Various Scales[J]. Chin. Phys. Lett., 2004, 21(7): 632-635
Viewed
Full text


Abstract