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Achieving Thin Films with Micro/Nano-Scale Controllable Morphology by Glancing Angle Deposition Technique |
JIANG Shao-Ji, WANG Chao-Yi, TANG Ji-Jia, HU Lin-Xin |
State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510275 |
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Cite this article: |
JIANG Shao-Ji, WANG Chao-Yi, TANG Ji-Jia et al 2008 Chin. Phys. Lett. 25 4368-4370 |
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Abstract We demonstrate that thin films with micro/nanometre controllable morphology can be fabricated by the glancing angle deposition (GLAD) technique which is a physical vapour deposition technique. In this technique, there are parameters which determine the morphology of the thin films: the incident angle, ratio of the deposition rate with respect to the substrate rotation rate, nature of the material being deposited, etc. We fabricate the morphology of column, pillar, helices, zigzag and study the parameters which determine morphology by given some examples of SEM.
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Keywords:
68.55.-a
61.46.-w
81.15.-z
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Received: 12 September 2008
Published: 27 November 2008
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PACS: |
68.55.-a
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(Thin film structure and morphology)
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61.46.-w
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(Structure of nanoscale materials)
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81.15.-z
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(Methods of deposition of films and coatings; film growth and epitaxy)
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[1] Shen Z C, Liu S J, Huang J B, Shao J D and Fan Z X 2007 Chin. Phys. Lett. 24 1029 [2] Zhang F, Xu J, Lakhtakia A, Zhu T, Pursel S M and Horn M W2008 Appl. Phys. Lett. 92 111109 [3] Zhang F, Xu J, Lakhtakia A, Zhu T, Pursel S M, Horn M Wand Wang A 2007 Appl. Phys. Lett. 91 023102 [4] Kim J K et al 2008 Adv. Mater. 20 801 [5] Tang F, Liu D, Ye D, Zhao Y, Lu T and Vijayaraghavan A2003 J. Appl. Phys. 93 4194 [6] Robbie K and Brett M J 1997 J. Vac. Sci. Technol. A 15 1460 [7] Dick B, Brett M J and Smy T 2003 J. Vac. Sci.Technol. B 21 23 [8] Malac M and Egerton R 2001 J. Vac. Sci. Technol. A 19 158 [9] Malac M, Egerton R, Brett M J and Dick B 1999 J. Vac.Sci. Technol. B 17 2671 [10] Jena Y J and Yu C W 2007 Appl. Phys. Lett. 91 021109 [11] Zhou C M and Galla D 2007 Appl. Phys. Lett. 90 093103 [12] Wang H H, Shi Y J, Chu W and Blum Y 2008 Chin. Phys.Lett. 25 234 [13] Harris K, Vick D, Smy T and Brett M 2002 J. Vac.Sci. Technol. A 20 2062 [14] Nieuwenhuizen J and Haanstra H B 1966 Philips Tech.Rev. 27 87 [15] Tait R N, Smy T and Brett M J 1993 Thin Solid Films 226 196 [16] Liu F, Umlor T, Weston J, Eads W, Barnard J A and MankeyG T 1999 J. Appl. Phys. 85 5486 [17] Vick D, Friedrich L J, Dew S K, Brett M J, Robbie K, SetoM and Smy T 1999 Thin Solid Films 339 88 |
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