| Original Articles |
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Estimation of Plasma Density by Surface Plasmons for Surface-Wave Plasmas |
| CHEN Zhao-Quan, LIU Ming-Hai, LAN Chao-Hui, CHEN Wei, LUO Zhi-Qing, HU Xi-Wei |
| Key Laboratory of Fusion and Advanced Electromagnetic Technology of Ministry of Education, College of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan 430074 |
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| Cite this article: |
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CHEN Zhao-Quan, LIU Ming-Hai, LAN Chao-Hui et al 2008 Chin. Phys. Lett. 25 4333-4335 |
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Abstract An estimation method of plasma density based on surface plasmons theory for surface-wave plasmas is proposed. The number of standing-wave is obtained directly from the discharge image, and the propagation constant is calculated with the trim size of the apparatus in this method, then plasma density can be determined with the value of 9.1×1017m-3. Plasma density is measured using a Langmuir probe, the value is 8.1×1017m-3 which is very close to the predicted value of surface plasmons theory. Numerical simulation is used to check the number of standing-wave by the finite-difference time-domain (FDTD) method also. All results are compatible both of theoretical analysis and experimental measurement.
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| Keywords:
52.40.Fd
52.50.Sw
52.40.Hf
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Received: 16 July 2008
Published: 27 November 2008
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| PACS: |
52.40.Fd
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(Plasma interactions with antennas; plasma-filled waveguides)
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52.50.Sw
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(Plasma heating by microwaves; ECR, LH, collisional heating)
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52.40.Hf
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(Plasma-material interactions; boundary layer effects)
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[1] Sugai H, Ghanashev I and Nagatsu M 1998 PlasmaSources Sci. Technol. 7 192
[2] Nagatsu M, Naito K, Ogino A and Nanko S 2006 PlasmaSources Sci. Technol. 15 37
[3] Ghanashev I and Sugai H 2000 Phys. Plasmas 73051
[4] Nagatsu M, Morita S, Ghanashev I, Ito A, Toyoda N andSugai H 2000 J. Phys. D: Appl. Phys. 33 1143
[5] Kousaka H, Ono K, Umehara N, Sawada I and Ishibashi K 2006 Thin Solid Films 506--507 503
[6] Ghanashev I, Nagatsu M and Sugai H 1997 Jpn. J. Appl.Phys. 36 337
[7] Wu C F, Zhan R J, Wen X H and Huang W D 2001 IEEETrans. Plas. Sci. 29 13
[8] Liu M H, Sugai H, Hu X W, Ishijima T, Jiang Z H, Li Band Dan M 2006 Acta Phys. Sin. 55 5905
[9] Barnes W L, Dereux A and Ebbesen T W 2003 Nature(London) 424 824
[10] Xu T, Zhao Y H, Gan D C, Wang C T, Du C L and Luo X G2008 Appl. Phys. Lett. 92 101501
[11] Xu X, Liu Feng, Zhou Q H, Liang B, Liang Y Z and LiangR Q 2008 Appl. Phys. Lett. 92 011501
[12] Liang Y Z, Ou Q R, Liang B and Liang R Q 2008 Chin. Phys. Lett. 25 1761
[13] Chen Z Q, Zhou P Q, Chen W, Lan C H, Liu M H and Hu X W2008 Plasma Sci. Technol. (accepted)
[14] Lan C H, Chen Z Q, Liu M H and Hu X W 2008 PlasmaSci. Technol. (accepted)
[15] Yee K S 1966 IEEE Trans. Antennas Propagat. 14 302-307
[16] Taflove and Hagness S C 2000 ComputationalElectrodynamics: The Finite-Difference Time-Domain Method (Boston,MA: Artech House) |
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