Chin. Phys. Lett.  2007, Vol. 24 Issue (2): 516-517    DOI:
Original Articles |
A Comparison between AlN Films Grown by MOCVD Using Dimethylethylamine Alane and Trimethylaluminium as the Aluminium Precursors
HU Wei-Guo1;LIU Xiang-Lin1;ZHANG Pan-Feng1;ZHAO Feng-Ai1;JIAO Chun-Mei1;WEI Hong-Yuan1;ZHANG Ri-Qing1;WU Jie-Jun1;CONG Guang-Wei1;PAN Yi2
1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 2Department of Chemistry, Nanjing University, Nanjing 210093
Cite this article:   
HU Wei-Guo, LIU Xiang-Lin, ZHANG Pan-Feng et al  2007 Chin. Phys. Lett. 24 516-517
Download: PDF(238KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract Aluminium nitride (AlN) films grown with dimethylethylamine alane (DMEAA) are compared with the ones grown with trimethylaluminium (TMA). In the high-resolution x-ray diffraction Ω scans, the full width at half maximum (FWHM) of (0002) AlN films grown with DMEAA is about 0.70 deg, while the FWHM of (0002) AlN films grown with TMA is only 0.11 deg. The surface morphologies of the films are different, and the rms roughnesses of the surface are approximately identical. The rms roughness of AlN films grown with DMEAA is 47.4nm, and grown with TMA is 69.4nm. Although using DMEAA as the aluminium precursor cannot improve the AlN crystal quality, AlN growth can be reached at low temperature of 673K. Thus, DMEAA is an alternative aluminium precursor to deposit AlN film at low growth temperatures.
Keywords: 68.55.-a      81.15.Kk      81.05.Ea     
Received: 26 September 2006      Published: 24 February 2007
PACS:  68.55.-a (Thin film structure and morphology)  
  81.15.Kk (Vapor phase epitaxy; growth from vapor phase)  
  81.05.Ea (III-V semiconductors)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2007/V24/I2/0516
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
HU Wei-Guo
LIU Xiang-Lin
ZHANG Pan-Feng
ZHAO Feng-Ai
JIAO Chun-Mei
WEI Hong-Yuan
ZHANG Ri-Qing
WU Jie-Jun
CONG Guang-Wei
PAN Yi
[1] Sun W, Adivarahan V, Shatalov M, Lee Y, Wu S, Yang J, Zhang J andKhan M A 2004 Jpn. J. Appl. Phys. 43 L1419
[2] Hanlon A, Pattison P M, Kaeding J F, Sharma R, Fini P and NakamuraS 2003 Jpn. J. Appl. Phys. 42 L628
[3] Yoshitaka T, Makoto K and Toshiki M 2006 Nature 44 325
[4] Hirayama H, Enomoto Y, Kinoshita A, Harita A and Aoyagi Y 2002 Appl. Phys. Lett. 80 37
[5] Bliss D F, Tassev V L, Weyburne D and Bailey J S 2003 J.Crystal Growth 250 1
[6] Zhang J P, Asif Khan M, Sun W H, Wang H M, Chen C Q, Fareed Q,Kuokstis E and Yang J W 2002 Appl. Phys. Lett. 81 4392
[7] Wang J F, Zhang B S, Zhang J C, Zhu J J, Wang Y T, Chen J, Liu W,Jiang D S, Yao D Z and Yang H 2006 Chin. Phys. Lett. 23 2591
[8] Ohba Y, Sato R and Kaneko K 2001 Jpn. J. Appl. Phys. 40L1293
[9] Li D S, Chen H, Yu H B, Zheng X H, Huang Q and Zhou J M 2004 Chin. Phys. Lett. 21 970
[10] Han X X, Wu J J, Li J M, Cong G W, Liu X L, Zhu Q S, Wang Z G 2005 Chin. Phys. Lett. 22 2096
[11] Nam K B, Li J, Lin J Y and Jiang H X 2004 Appl. Phys. Lett. 85 3489
[12] Bertolet D C, Liu Herng and Rogers J W Jr 1994 J. Appl.Phys. 75 10
[13] Kidder J N, Kuo J S, Ludviksson A, Pearsall T P, Roger J W Jr,John M G, Lynn R A and Sheng T H 1995 J. Vac. Sci. Technol. A 13711
[14] Amano H, Sawaki N, Akasaki I and Toyoda Y 1986 Appl.Phys. Lett. 48 353
[15] Akasaki I, Amano H, Koide Y, Hiramatsu K and Sawaki N 1989 J.Cryst. Growth 98 209
[16] Ohba Yand Sato R 2000 J. Cryst. Growth 221 258
[17] Nakamura F, Hashimoto S, Hara M, Imanaga S, Ikeda M and Kawai H1998 J. Cryst. Growth 195 280
[18] Raghavan S and Redwing J M 2004 J. Appl. Phys. 96 5
[19] Chen P, Xie S Y, Chen Z Z, Zhou Y G, Shen B, Zhang R, Zheng Y D,Zhu J M, Wang M, Wu X S, Jiang S S and Feng D 2000 J. CrystalGrowth 213 27
[20] Wuu D S, Horng R H, Tseng W H, Lin W T and Kung C Y 2000 J.Crystal Growth 220 235
Related articles from Frontiers Journals
[1] WANG Guo-Biao, XIONG Huan, LIN You-Xi, FANG Zhi-Lai, KANG Jun-Yong, DUAN Yu, SHEN Wen-Zhong. Green Emission from a Strain-Modulated InGaN Active Layer[J]. Chin. Phys. Lett., 2012, 29(6): 516-517
[2] DING Tao, SONG Jun-Qiang, CAI Qun. Effect of Multiple Depositions and Annealing Treatments on the Erbium Silicide Nanoislands Self-Assembled on Si(001) Substrates[J]. Chin. Phys. Lett., 2012, 29(3): 516-517
[3] CHENG Feng-Feng , FA Tao, WANG Xin-Qiang, YAO Shu-De. Dislocation and Elastic Strain in an InN Film Characterized by Synchrotron Radiation X-Ray Diffraction and Rutherford Backscattering/Channeling[J]. Chin. Phys. Lett., 2012, 29(2): 516-517
[4] SANG Ling, LIU Jian-Ming, XU Xiao-Qing, WANG Jun, ZHAO Gui-Juan, LIU Chang-Bo, GU Cheng-Yan, LIU Gui-Peng, WEI Hong-Yuan, LIU Xiang-Lin, YANG Shao-Yan, ZHU Qin-Sheng, WANG Zhan-Guo. Morphological Evolution of a-GaN on r-Sapphire by Metalorganic Chemical Vapor Deposition[J]. Chin. Phys. Lett., 2012, 29(2): 516-517
[5] XU Sheng-Rui**, LIN Zhi-Yu, XUE Xiao-Yong, LIU Zi-Yang, MA Jun-Cai, JIANG Teng, MAO Wei, WANG Dang-Hui, ZHANG Jin-Cheng, HAO Yue. Comparative Study of the Characteristics of the Basal Plane Stacking Faults of Nonpolar a−Plane and Semipolar (11[J]. Chin. Phys. Lett., 2012, 29(1): 516-517
[6] SONG Shi-Wei, LIANG Hong-Wei**, LIU Yang, XIA Xiao-Chuan, SHEN Ren-Sheng, LUO Ying-Min, DU Guo-Tong,. A Study of GaN Grown on SiH4 Pre-Treated 6H-SiC Substrates[J]. Chin. Phys. Lett., 2012, 29(1): 516-517
[7] XU Wei-Wei, HU Lin-Hua, LUO Xiang-Dong, LIU Pei-Sheng, DAI Song-Yuan**. The Electric Mechanism of Surface Pretreatments for Dye-Sensitized Solar Cells Based on Internal Equivalent Resistance Analysis[J]. Chin. Phys. Lett., 2012, 29(1): 516-517
[8] PAN Jiang-Hong, LIU Li-Zhe, LIU Min** . Hydrogenic-Donor Impurity States in GaAs/Al xGa 1−xAs Quantum Dots in the Presence of an Electric Field[J]. Chin. Phys. Lett., 2011, 28(8): 516-517
[9] ZHOU Yan, WANG Hai-Long**, MA Chuan-He, GONG Qian, FENG Song-Lin . Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate[J]. Chin. Phys. Lett., 2011, 28(7): 516-517
[10] CHEN San, **, Lu Hong-Yan, CHEN Kun-Ji**, XU Jun, MA Zhong-Yuan, LI Wei, HUANG Xin-Fan . Two-Dimensional Cavity Resonant Modes of Si Based Bragg Reflection Ridge Waveguide[J]. Chin. Phys. Lett., 2011, 28(6): 516-517
[11] PAN Jian-Hai, WANG Xin-Qiang**, CHEN Guang, LIU Shi-Tao, FENG Li, XU Fu-Jun, TANG Ning, SHEN Bo*** . Epitaxy of an Al-Droplet-Free AlN Layer with Step-Flow Features by Molecular Beam Epitaxy[J]. Chin. Phys. Lett., 2011, 28(6): 516-517
[12] WU Meng, **, ZENG Yi-Ping, , WANG Jun-Xi, HU Qiang . Investigation of a GaN Nucleation Layer on a Patterned Sapphire Substrate[J]. Chin. Phys. Lett., 2011, 28(6): 516-517
[13] LIU Zhan-Hui, XIU Xiang-Qian**, YAN Huai-Yue, ZHANG Rong, XIE Zi-Li, HAN Ping, SHI Yi, ZHENG You-Dou . Gallium Nitride Nanowires Grown by Hydride Vapor Phase Epitaxy[J]. Chin. Phys. Lett., 2011, 28(5): 516-517
[14] CHEN Hai-Yang, JIANG Lan**, LI Da-Rang . Measurement of Beta Particles Induced Electron-Hole Pairs Recombination in Depletion Region of GaAs PN Junction[J]. Chin. Phys. Lett., 2011, 28(5): 516-517
[15] CHEN Yao**, JIANG Yang, XU Pei-Qiang, MA Zi-Guang, WANG Xiao-Li, WANG Lu, JIA Hai-Qiang, CHEN Hong . Stress Control in GaN Grown on 6H-SiC by Metalorganic Chemical Vapor Deposition[J]. Chin. Phys. Lett., 2011, 28(4): 516-517
Viewed
Full text


Abstract