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Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging |
DONG Feng-Liang1;ZHANG Qing-Chuan1;CHEN Da-Peng2;MIAO Zheng-Yu1;XIONG Zhi-Ming1;GUO Zhe-Ying1;LI Chao-Bo1;JIAO Bin-Bin1;WU Xiao-Ping1 |
| 1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100029 |
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| Cite this article: |
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DONG Feng-Liang, ZHANG Qing-Chuan, CHEN Da-Peng et al 2007 Chin. Phys. Lett. 24 3362-3364 |
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Abstract We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A
160×160 array with a 120μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
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| Keywords:
07.57.Kp
07.10.Cm
42.30.Va
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Received: 13 March 2007
Published: 03 December 2007
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| PACS: |
07.57.Kp
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(Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)
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07.10.Cm
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(Micromechanical devices and systems)
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42.30.Va
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(Image forming and processing)
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[5] Duan Z et al 2003 Chin. Phys. Lett. 20 2130
[6] Dong F et al 2007 Sens. Actuators A 133 236
[7] Li C et al 2006 Meas. Sci. Technol. 17 1981
[8] Miao Z et al 2006 Acta Phys. Sin. 55 3208 (inChinese) |
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