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Deposition of ZnO Films on Freestanding CVD Thick Diamond Films |
| SUN Jian1,2;BAI Yi-Zhen1,2;YANG Tian-Peng3;XU Yi-Bin2;WANG Xin-Sheng2;DU Guo-Tong2,3;WU Han-Hua4 |
| 1State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024
2Department of Physics, Dalian University of Technology, Dalian 116024
3College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130023
4College of Physics, Jilin University, Changchun 130023 |
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| Cite this article: |
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SUN Jian, BAI Yi-Zhen, YANG Tian-Peng et al 2006 Chin. Phys. Lett. 23 1321-1323 |
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Abstract For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition (MOCVD). The properties of the ZnO films are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed.
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81.15.Gh
68.55.Jk
68.35.Iv
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Published: 01 May 2006
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| PACS: |
81.15.Gh
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(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
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68.55.Jk
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68.35.Iv
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(Acoustical properties)
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