Characteristics of Gas Flow within a Micro Diffuser/Nozzle Pump

Chin. Phys. Lett.

2006, Vol. 23

Issue (5): 1230-1233 DOI:

Original Articles

Characteristics of Gas Flow within a Micro Diffuser/Nozzle Pump

LI Xiu-Han¹;YU Xiao-Mei¹;ZHANG Da-Cheng¹;CUI Hai-Hang²;LI Ting;WANG Ying¹;WANG Yang-Yuan¹

¹Institute of Microelectronics, Peking University, Beijing 100871 ²Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080

Cite this article:

LI Xiu-Han, YU Xiao-Mei, ZHANG Da-Cheng et al 2006 Chin. Phys. Lett. 23 1230-1233

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Abstract The gas flow characteristics for various shapes of micro diffuser/nozzles have been experimentally investigated. The micro diffuser/nozzles with the lengths of 70μm, 90μm, 125μm and the taper angles of 7°, 10°, 14° are designed and fabricated based on silicon micromachining technology for optimizing and comparing. The flat-wall diffuser/nozzle is 40μm × 5μm in depth and width. An experimental setup is designed to measure the gas flow rates under controlled temperature and pressure condition. Optimized values for the taper angle and the length of the diffuser/nozzle are experimentally obtained.

Keywords: 47.60.+i 47.17.+e 47.45.-n

Published: 01 May 2006

PACS:	47.60.+i
	47.17.+e
	47.45.-n	(Rarefied gas dynamics)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2006/V23/I5/01230

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	LI Xiu-Han
	YU Xiao-Mei
	ZHANG Da-Cheng
	CUI Hai-Hang
	LI Ting
	WANG Ying
	WANG Yang-Yuan

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