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A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors |
| LI Ming1;WANG Ming1;RONG Hua1;LI Hong-Pu2 |
| 1Key Laboratory of Opto-Electronic Technology, School of Physical Science and Technology, Nanjing Normal University, Nanjing 210097
2Department of Electrical and Electronics Engineering, Shizuoka University, Hamamatsu, 432-8501, Japan |
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| Cite this article: |
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LI Ming, WANG Ming, RONG Hua et al 2006 Chin. Phys. Lett. 23 1211-1214 |
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Abstract An optical microelectromechanical-system (MEMS) pressure sensor based on multi-layer circular diaphragm is described and analysed by using the proposed novel analytical approach and the traditional transfer matrix method. The analytical expressions of the deflection of multi-layer diaphragm and absolute optical reflectance are derived respectively. The influence of residual stress on the deflection of diaphragm is also analysed. Simulation results given by the finite element method are consistent with the ones which are analysed by using the analytical approach. The analytical approach will be helpful to design and fabricate the optical MEMS pressure sensors with multi-layer diaphragm based on Fabry--Perot interferometry.
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| Keywords:
42.81.Pa
07.07.Df
42.79.Pw
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Published: 01 May 2006
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| PACS: |
42.81.Pa
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(Sensors, gyros)
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07.07.Df
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(Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)
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42.79.Pw
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(Imaging detectors and sensors)
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