Comparison of Properties of Pt/PZT/Pt and Ru/PZT/Pt Ferroelectric Capacitors

Chin. Phys. Lett.

2006, Vol. 23

Issue (4): 1042-1045 DOI:

Original Articles

Comparison of Properties of Pt/PZT/Pt and Ru/PZT/Pt Ferroelectric Capacitors

JIA Ze;REN Tian-Ling;LIU Tian-Zhi;HU Hong;ZHANG Zhi-Gang;XIE Dan;LIU Li-Tian

Institute of Microelectronics, Tsinghua University, Beijing 100084

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JIA Ze, REN Tian-Ling, LIU Tian-Zhi et al 2006 Chin. Phys. Lett. 23 1042-1045

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Abstract Pb(Zr_0.4Ti_0.6)O₃ film prepared by sol-gel spin coating on a Pt/Ti/SiO₂/Si substrate is applied to ferroelectric capacitors with Pt or Ru as the top electrode. For the Pt/PZT/Pt and Ru/PZT/Pt ferroelectric capacitors, although with the same ferroelectric film, different top electrode materials incur different properties of PZT capacitors, such as fatigue, leakage, remanent and saturated polarization, except the similar crystal orientations of the PZT film. After 10¹⁰ switch cycles, the remanent polarizations of the Ru/PZT/Pt and Pt/PZT/Pt capacitors decrease to 70% and 84%, respectively. The leakage current density of the latter increases obviously at positive bias after 10⁸ switch cycles, compared with the former. Different materials for the top electrode bring different conditions at the PZT/top electrode interface. The influence of oxygen-vacancy concentration at the PZT/electrode interface and the influence of oxides of the electrode material at the PZT/electrode interface to charge injection can explain the difference of properties of the PZT capacitors with Pt or Ru as the top electrodes.

Keywords: 85.50.-n 85.50.Ak

Published: 01 April 2006

PACS:	85.50.-n	(Dielectric, ferroelectric, and piezoelectric devices)
	85.50.Ak

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2006/V23/I4/01042

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	JIA Ze
	REN Tian-Ling
	LIU Tian-Zhi
	HU Hong
	ZHANG Zhi-Gang
	XIE Dan
	LIU Li-Tian

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