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Investigation of Laser-Induced Damage on Multi-Layer Dielectric Gratings |
| KONG Wei-Jin1,2;SHEN Zi-Cai1;SHEN Jian1;SHAO Jian-Da1;FAN Zheng-Xiu1 |
| 1R&D Center for Optical Thin Film Coating, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2Graduate School of the Chinese Academy of Sciences, Beijing 100039 |
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| Cite this article: |
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KONG Wei-Jin, SHEN Zi-Cai, SHEN Jian et al 2005 Chin. Phys. Lett. 22 1757-1760 |
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Abstract We investigate mechanisms of laser induced damage thresholds (LIDTs) of multi-layer dielectric gratings (MDGs). It is found that the laser damage thresholds of MDGs and unstructured dielectric multi-layer coatings (the substrate of MDG) are 3.15J/cm2 and 9.32/cm2, respectively, at 1064nm (12ns) with the Littrow angle 51.2° and the TEM00 mode. The laser-induced damage mechanism of multi-layer dielectric is presented with the analysis of the following factors: The dominant factor is the pollution on the corrugated surface, which is induced by the complex manufacture process of multi-layer dielectric gratings; another is the electric field distribution along the corrugated surface. The third reason is due to the reduction in stoichiometry of oxide films, resulting from the manufacture process of etching.
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| Keywords:
68.60.-p
73.21.Ac
77.55.+f
81.40.Wx
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Published: 01 July 2005
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