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Low Power-Consumption and High Response Frequency Thermo-Optic Variable Optical Attenuators Based on Silicon-on-Insulator Materials |
| FANG Qing1;CHEN Peng1;XIN Hong-Li1;WANG Chun-Xia2;LI Fang1;LIU Yu-Liang1 |
| 1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
2Department of Physics, Wuhan University, Wuhan 430072 |
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| Cite this article: |
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FANG Qing, CHEN Peng, XIN Hong-Li et al 2005 Chin. Phys. Lett. 22 1452-1455 |
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Abstract A novel silicon-on-insulator thermo-optic variable optical attenuator with isolated grooves based on a multimode interference coupler principle is fabricated by the inductive coupled plasma etching technology. The maximum fibre-to-fibre insertion loss is lower than 2.2dB, the dynamic attenuation range is from 0 to 30dB in the wavelength range 1500--1600nm, and the maximum power consumption is only 140mW. The response frequency of the fabricated variable optical attenuator is about 30kHz. Compared to the variable optical attenuator without isolated grooves, the maximum power consumption decreases more than 220mW, and the response frequency rises are more than 20kHz.
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| Keywords:
42.82.Et
42.30.Lr
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Published: 01 June 2005
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| PACS: |
42.82.Et
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(Waveguides, couplers, and arrays)
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42.30.Lr
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(Modulation and optical transfer functions)
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