| Original Articles |
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A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radicals in Silane Plasma |
| WANG Zhao-Kui;LIN Kui-Xun;LIN Xuan-Ying;QIU Gui-Ming;ZHU Zu-Song |
| Department of Physics, Shantou University, Shantou 515063 |
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| Cite this article: |
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WANG Zhao-Kui, LIN Kui-Xun, LIN Xuan-Ying et al 2005 Chin. Phys. Lett. 22 904-906 |
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Abstract A movable mass spectroscopy gas sampling apparatus has been established and a straight-line fit of silane depletion fraction f is proposed. The spatial density distributions of SiHn (n=0-3) radicals in
silane radio frequency glow discharge have been measured by a mass spectrometer. The experimental results demonstrate that the densities of the neutral radicals have the peak value near the middle position of electrodes, and the densities of SiH2 and SiH3 are higher than those of Si and SiH in silane plasma. This reveals that SiH2 and SiH3 may be the primary precursors in forming the a-Si:H film.
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| Keywords:
52.70.Nc
82.80.Ms
06.60.Ei
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Published: 01 April 2005
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| PACS: |
52.70.Nc
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(Particle measurements)
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82.80.Ms
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(Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI))
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06.60.Ei
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(Sample preparation)
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