Dielectric Properties of Multilayered Ba0.5Sr0.5TiO3 Thin Films Deposited on ITO-Coated Corning 1737 Glass by rf Magnetron Sputtering

Chin. Phys. Lett.

2005, Vol. 22

Issue (11): 2947-2949 DOI:

Original Articles

Dielectric Properties of Multilayered Ba_0.5Sr_0.5TiO₃ Thin Films Deposited on ITO-Coated Corning 1737 Glass by rf Magnetron Sputtering

LIN Ming-Tong¹;CHEN Guo-Rong¹;YANG Yun-Xia¹;XIAO Tian²;XU Yi²;LOU Jun-Hui²;CHEN Chen-Xi²

¹Key Laboratory for Superfine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, Shanghai 200237 ²SVA Electron Co. Ltd., Shanghai 200081

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LIN Ming-Tong, CHEN Guo-Rong, YANG Yun-Xia et al 2005 Chin. Phys. Lett. 22 2947-2949

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Abstract A new stacking method via variation of substrate temperature in rf magnetron sputter is used to fabricate polycrystalline/polycrystalline Ba_0.5Sr_0.5TiO₃ thin films with higher dielectric constant, higher breakdown strength and lower leakage current densities than those prepared by a conventional deposition method. The improved figure of merit G (ε₀ε_rE_b) of the Ba_0.5Sr_0.5TiO₃ thin films implies that they are a feasible insulation layer for thin film electroluminescent devices.

Keywords: 77.55.+f 73.61.Ng 68.55.Jk

Published: 01 November 2005

PACS:	77.55.+f
	73.61.Ng	(Insulators)
	68.55.Jk

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2005/V22/I11/02947

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	LIN Ming-Tong
	CHEN Guo-Rong
	YANG Yun-Xia
	XIAO Tian
	XU Yi
	LOU Jun-Hui
	CHEN Chen-Xi

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