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Novel Folding Large-Scale Optical Switch Matrix with Total Internal Reflection Mirrors on Silicon-on-Insulator by Anisotropy Chemical Etching |
| LIU Jing-Wei;YU Jin-Zhong;CHEN Shao-Wu |
| State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, PO Box 912, Beijing 100083 |
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| Cite this article: |
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LIU Jing-Wei, YU Jin-Zhong, CHEN Shao-Wu 2005 Chin. Phys. Lett. 22 142-145 |
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Abstract A compact optical switch matrix was designed, in which light circuits were folded by total internal reflective (TIR) mirrors. Two key elements, 2×2 switch and TIR mirror, have been fabricated on silicon on-insulator wafer by anisotropy chemical etching. The 2×2 switch showed very low power consumption of 140mW and a very high speed of 8±1μs. An improved design for the TIR mirror was developed, and the fabricated mirror with smooth and vertical reflective facet showed low excess loss of 0.7±0.3dB at 1.55μm.
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| Keywords:
42.82.Ds
42.82.Cr
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Published: 01 January 2005
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| PACS: |
42.82.Ds
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(Interconnects, including holographic interconnects)
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42.82.Cr
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(Fabrication techniques; lithography, pattern transfer)
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