Chin. Phys. Lett.  2004, Vol. 21 Issue (8): 1600-1603    DOI:
Original Articles |
Silicon-on-Insulating Multi-Layers for Total-Dose Irradiation Hardness
ZHANG En-Xia1;YI Wan-Bing1;LIU Xiang-Hua2;CHEN Meng1;LIU Zhong-Li3;Wang Xi1
1Ion Beam Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 2Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, New Territories, Hong Kong 3Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Cite this article:   
ZHANG En-Xia, YI Wan-Bing, LIU Xiang-Hua et al  2004 Chin. Phys. Lett. 21 1600-1603
Download: PDF(382KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract Silicon-on-insulating multi-layer (SOIM) materials were fabricated by co-implantation of oxygen and nitrogen ions with different energies and doses. The multilayer microstructure was investigated by cross-sectional transmission electron microscopy. P-channel metal--oxide--semiconductor (PMOS) transistors and metal--semiconductor--insulator--semiconductor (MSIS) capacitors were produced by these materials. After the irradiated total dose reaches 3×105 rad (Si), the threshold voltage of the SOIM-based PMOS transistor only shifts 0.07V, while thin silicon-on-insulating buried-oxide SIMOX-based PMOS transistors have a shift of 1.2V, where SIMOX represents the separated by implanted oxygen. The difference of capacitance of the SOIM-based MSIS capacitors before and after irradiation is less than that of the thin-box SIMOX-based MSIS capacitor. The results suggest that the SOIM materials have a more remarkable irradiation tolerance of total dose effect, compared to the thin-buried-oxide SIMOX materials.
Keywords: 61.72.Tt      68.37.Lp      85.40.Ry     
Published: 01 August 2004
PACS:  61.72.Tt  
  68.37.Lp (Transmission electron microscopy (TEM))  
  85.40.Ry (Impurity doping, diffusion and ion implantation technology)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2004/V21/I8/01600
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
ZHANG En-Xia
YI Wan-Bing
LIU Xiang-Hua
CHEN Meng
LIU Zhong-Li
Wang Xi
Related articles from Frontiers Journals
[1] FAN Xiao-Hong,XU Bin**,NIU Zhen,ZHAI Tong-Guang,TIAN Bin. Fine Structural and Carbon Source Analysis for Diamond Crystal Growth using an Fe-Ni-C System at High Pressure and High Temperature[J]. Chin. Phys. Lett., 2012, 29(4): 1600-1603
[2] GUO Xiao-Song, LU Bing-An, XIE Er-Qing** . Growth of Graphene Nanoribbons and Carbon Onions from Polymer[J]. Chin. Phys. Lett., 2011, 28(7): 1600-1603
[3] DING Tao, SONG Jun-Qiang, LI Juan, CAI Qun** . Thermal Stability and Growth Behavior of Erbium Silicide Nanowires Self-Assembled on a Vicinal Si(001) Surface[J]. Chin. Phys. Lett., 2011, 28(6): 1600-1603
[4] ZHANG Shi-Liang, ZHANG Xin-Yu, WANG Lin-Min, QI Li, ZHANG Su-Hong, ZHU Yan, LIU Ri-Ping** . Voronoi Structural Evolution of Bulk Silicon upon Melting[J]. Chin. Phys. Lett., 2011, 28(6): 1600-1603
[5] GUO Jing-Wei**, HUANG Hui, REN Xiao-Min, YAN Xin, CAI Shi-Wei, GUO Xin, HUANG Yong-Qing, WANG Qi, ZHANG Xia, WANG Wei . Growth of Zinc Blende GaAs/AlGaAs Radial Heterostructure Nanowires by a Two-Temperature Process[J]. Chin. Phys. Lett., 2011, 28(3): 1600-1603
[6] LIU Li-Hu, GU Jian-Jun, , LI Hai-Tao, , CAI Ning, SUN Hui-Yuan,. Synthesis and Characteristics of Electrodeposited CoxZn1-x Nanorods[J]. Chin. Phys. Lett., 2010, 27(6): 1600-1603
[7] JIANG Zhi-Ang, CHEN Jiang-Tao, WANG Jun, ZHUO Ren-Fu, YAN De, ZHANG Fei, YAN Peng-Xun. CuO Nanosheets Synthesized by Hydrothermal Process[J]. Chin. Phys. Lett., 2009, 26(8): 1600-1603
[8] LI Wei-Long, JIA Rui, LIU Ming, CHEN Chen, XIE Chang-Qing, ZHU Chen-Xin, LI Hao-Feng, ZHANG Pei-Wen, YE Tian-Chun. Fabrication and Characterization of Si Nanocrystals Synthesized by Electron Beam Evaporation of Si and SiO2 Mixture[J]. Chin. Phys. Lett., 2009, 26(4): 1600-1603
[9] LIANG Zhong-Zhu, LIANG Jing-Qiu, JIA Xiao-Peng. Effects of NaN3 Added in Fe-C System on Inclusion and Impurity of Diamond Synthesized at High Pressure and High Temperature[J]. Chin. Phys. Lett., 2009, 26(3): 1600-1603
[10] DENG Jiang-Xia, YAN Shi-Shen, MEI Liang-Mo, J. P. Liu, B. Altuncevahir, V. Chakka, WANG Yong, ZHANG Ze, SUN Xiang-Cheng, J. Lian, K. Sun. Magnetic Properties and Antiferromagnetic Coupling in Inhomogeneous Zn1-xFexO Magnetic Semiconductor[J]. Chin. Phys. Lett., 2009, 26(2): 1600-1603
[11] LIU Xu-Yan, LIU Wei-Li, MA Xiao-Bo, CHEN Chao, SONG Zhi-Tang, LIN Cheng-Lu. Growth of High Quality Strained-Si on Ultra-Thin SiGe-on-Insulator Substrate[J]. Chin. Phys. Lett., 2009, 26(11): 1600-1603
[12] PENG Ming-Zeng, GUO Li-Wei, ZHANG Jie, YU Nai-Sen, ZHU Xue-Liang, YANJian-Feng, GE Bin-Hui, JIA Hai-Qiang, CHEN Hong, ZHOU Jun-Ming. Three-Step Growth Optimization of AlN Epilayers by MOCVD[J]. Chin. Phys. Lett., 2008, 25(6): 1600-1603
[13] LI Bing-Sheng, ZHANG Chong-Hong, ZHOU Li-Hong, YANG Yi-Tao,. Effects of Helium and Oxygen Common Implantation in Silicon Wafer[J]. Chin. Phys. Lett., 2008, 25(10): 1600-1603
[14] ZHAO Yu-Cheng, WANG Ming-Zhi. Cubic BN Sintered with Al under High Temperature and High Pressure[J]. Chin. Phys. Lett., 2007, 24(8): 1600-1603
[15] XING Zhi-Gang, WANG Jing, PEI Xiao-Jiang, WAN Wei, CHEN Hong, ZHOU Jun-Ming. Dislocation Reduction Mechanisms in Gallium Nitride Films Grown by Canti-Bridge Epitaxy Method[J]. Chin. Phys. Lett., 2007, 24(8): 1600-1603
Viewed
Full text


Abstract