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Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in Nitrogen Inductively Coupled Plasma Discharges |
| MA Jie;PU Yi-Kang |
| Department of Engineering Physics, Tsinghua University, Beijing
100084 |
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| Cite this article: |
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MA Jie, PU Yi-Kang 2003 Chin. Phys. Lett. 20 1527-1529 |
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Abstract By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200 W rf powers. In pure N2 discharges a Maxwellian EEDF is observed. When the mixing ratio of Ar increases, the distribution of high energy electrons evolves with a different trend from that of low energy electrons, resulting in an apparent “two temperature structure”of the EEDF. We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of “electron temperature” by both the probe and line ratio technique.
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| Keywords:
52.20.Fs
52.25.Jm
52.70.Ds
52.70.Kz
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Published: 01 September 2003
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| PACS: |
52.20.Fs
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(Electron collisions)
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52.25.Jm
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(Ionization of plasmas)
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52.70.Ds
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(Electric and magnetic measurements)
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52.70.Kz
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(Optical (ultraviolet, visible, infrared) measurements)
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