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A New Method for Preparing Superconducting MgB2 Films from Diborane |
WANG Dian-Sheng1,2;FU Xing-Hua1;ZHANG Zheng-Ping1,3;YANG Jian1 |
1Department of Physics, Guizhou University, Guiyang 550025
2Department of Applied Physics, University of Petroleum (East China), Shandong 257061
3Department of Information and Electronics, Zhejiang University, Hangzhou 310027 |
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Cite this article: |
WANG Dian-Sheng, FU Xing-Hua, ZHANG Zheng-Ping et al 2002 Chin. Phys. Lett. 19 1179-1180 |
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Abstract We report on a new preparation method for magnesium diboride (MgB2) films by chemical vapor deposition (CVD) from diborane (B2H6). It is a two-step ex-situ approach, with the precursor boron films grown by CVD from B2H6 at 460°C, and followed by a post-annealing process in magnesium (Mg) vapor at 830°C. The prepared MgB2 thin films on Al2O3 polycrystalline substrates have an onset transition temperature of 35 K and zero-resistance temperature of about 24 K. Well-crystallized MgB2 grains were clearly observed in the SEM images and confirmed by x-ray diffraction analysis. The advantages of the proposed method are the feasibility to prepare large-area superconducting films and the compatibility with semiconductor technology.
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Keywords:
74.76.Db
74.62.Bf
74.70.Ad
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Published: 01 August 2002
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PACS: |
74.76.Db
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74.62.Bf
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(Effects of material synthesis, crystal structure, and chemical composition)
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74.70.Ad
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(Metals; alloys and binary compounds)
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