Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems

Chin. Phys. Lett.

2002, Vol. 19

Issue (6): 832-834 DOI:

Original Articles

Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems

ZHENG Mao-Sheng;ZHOU Gen-Shu;ZHAO Wen-Zhen;GU Hai-Cheng

State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049

Cite this article:

ZHENG Mao-Sheng, ZHOU Gen-Shu, ZHAO Wen-Zhen et al 2002 Chin. Phys. Lett. 19 832-834

Download: PDF(237KB)
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks

Abstract Casimir force and residual stresses actually appear in over-layers or films simultaneously, the study of the behaviour of micro-/nano-electromechanical systems in the presence of Casimir force and residual stress is of significance to the design of the relevant devices. We derive analytical expressions of the deflection of a bridge shaped device under the mutual actions of Casimir force and residual stress in films. It is shown that the tensile residual stress enhances wavy behaviour of the deflection, while the compressive residual stress increases the deflection value and reduces the wavy behaviour.

Keywords: 62.20.-x 62.20.Dc 62.20.Fe 62.20.Mk 83.50.-v

Published: 01 June 2002

PACS:	62.20.-x	(Mechanical properties of solids)
	62.20.Dc
	62.20.Fe
	62.20.Mk
	83.50.-v	(Deformation and flow ?)

TRENDMD:

URL:

https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2002/V19/I6/0832

Service
	E-mail this article
	E-mail Alert
	RSS
Articles by authors
	ZHENG Mao-Sheng
	ZHOU Gen-Shu
	ZHAO Wen-Zhen
	GU Hai-Cheng

Related articles from Frontiers Journals

[1]	YUE Yong-Hai, WANG Li-Hua, ZHANG Ze, HAN Xiao-Dong. Cross-over of the Plasticity Mechanism in Nanocrystalline Cu[J]. Chin. Phys. Lett., 2012, 29(6): 832-834
[2]	SU Wei, LOU Shu-Qin, YIN Guo-Lu. Theoretical Study of the Structural and Thermodynamic Properties of Amorphous SiO₂ and Amorphous SiO₂ with an Oxygen Defect Center[J]. Chin. Phys. Lett., 2012, 29(6): 832-834
[3]	SUN Bao-Ru, ZHAN Zai-Ji, LIANG Bo, ZHANG Rui-Jun, WANG Wen-Kui . Light Emission and Dynamic Failure Mechanism of Hypervelocity Impact on Zr-Ti-Ni-Cu-Be Bulk Metallic Glass**[J]. Chin. Phys. Lett., 2011, 28(9): 832-834
[4]	JIN Min, FANG Yong-Zheng, SHEN Hui, JIANG Guo-Jian, WANG Zhan-Yong, XU Jia-Yue . Mechanical Property Evaluation of GaAs Crystal for Solar Cells**[J]. Chin. Phys. Lett., 2011, 28(8): 832-834
[5]	SHAO Xi . Prediction of a Low-Dense BC₂N Phase**[J]. Chin. Phys. Lett., 2011, 28(5): 832-834
[6]	CHEN Yao, JIANG Yang, XU Pei-Qiang, MA Zi-Guang, WANG Xiao-Li, WANG Lu, JIA Hai-Qiang, CHEN Hong . Stress Control in GaN Grown on 6H-SiC by Metalorganic Chemical Vapor Deposition**[J]. Chin. Phys. Lett., 2011, 28(4): 832-834
[7]	ZONG Hai-Tao, MA Ming-Zhen, ZHANG Xin-Yu, QI Li, LI Gong, JING Qin, LIU Ri-Ping . Formation and Compression Behavior of Two-Phase Bulk Metallic Glasses with a Minor Addition of Aluminum**[J]. Chin. Phys. Lett., 2011, 28(3): 832-834
[8]	ZHANG Fu-Chun, ZHANG Wei-Hu, DONG Jun-Tang, ZHANG Zhi-Yong . First-Principles Study of Fe-Doped ZnO Nanowires**[J]. Chin. Phys. Lett., 2011, 28(12): 832-834
[9]	O. Sahin, A. R�, za Tuncdemir, H. Ali Cetinkara, H. Salih Guder, E. Sahin . Production and Mechanical Behaviour of Biomedical CoCrMo Alloy**[J]. Chin. Phys. Lett., 2011, 28(12): 832-834
[10]	SHI Li-Wei, , DUAN Yi-Feng, YANG Xian-Qing, TANG Gang . Phonon and Elastic Instabilities in Zincblende TlN under Hydrostatic Pressure from First Principles Calculations**[J]. Chin. Phys. Lett., 2011, 28(10): 832-834
[11]	QI Mei-Lan, , ZHONG Sheng, FAN Duan, LUO Chao, HE Hong-Liang . Microscopic Characteristics of Damage Evolution in Ultrapure Aluminum under Tensile Loading**[J]. Chin. Phys. Lett., 2011, 28(1): 832-834
[12]	MA Dong-Fang, HOU Yan-Jun, CHEN Da-Nian, WU Shan-Xing, WANG Huan-Ran . A Novel Impact Tension Testing for OFHC Copper Bars under Local Strain Controlled**[J]. Chin. Phys. Lett., 2011, 28(1): 832-834
[13]	SHI Li-Wei, DUAN Yi-Feng, YANG Xian-Qing, QIN Li-Xia. Structural, Electronic and Elastic Properties of Cubic Perovskites SrSnO₃ and SrZrO₃ under Hydrostatic Pressure Effect[J]. Chin. Phys. Lett., 2010, 27(9): 832-834
[14]	B. Y. Thakore, S. G. Khambholja, P. H. Suthar, N. K. Bhatt, A. R. Jani. Collective Modes and Elastic Constants of Liquid Al₈₃Cu₁₇ Binary Alloy[J]. Chin. Phys. Lett., 2010, 27(9): 832-834
[15]	SHI Li-Wei, DUAN Yi-Feng, QIN Li-Xia. Structural Stability and Elastic Properties of Wurtzite TlN under Hydrostatic Pressure[J]. Chin. Phys. Lett., 2010, 27(8): 832-834

Viewed

Full text

Abstract