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Synthesis of Nano-Crystalline Diamond Film in Hot Filament
Chemical Vapour Deposition by Adding Ar |
ZHANG Yu-Feng;ZHANG Fan;GAO Qiao-Jun;YU Da-Peng;PENG Xiao-Fu;LIN Zeng-Dong |
Department of Physics, Peking University, Beijing 100871
Beijing Institute of Powder Metallurgy, Beijing 100078
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Cite this article: |
ZHANG Yu-Feng, ZHANG Fan, GAO Qiao-Jun et al 2001 Chin. Phys. Lett. 18 286-288 |
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Abstract Nano-crystalline diamond films are successfully deposited on silicon substrates via the hot filament chemical vapour deposition process using a CH4/H2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.
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Keywords:
81.15.Gh
68.55.-a
61.50.-f
61.16.Bg
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Published: 01 February 2001
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PACS: |
81.15.Gh
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(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
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68.55.-a
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(Thin film structure and morphology)
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61.50.-f
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(Structure of bulk crystals)
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61.16.Bg
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